公开(公告)号：US08687662B2

公开(公告)日：2014-04-01

申请号：US13896231

申请日：2013-05-16

Applicant: Anvik Corporation

Inventor： Kanti Jain

IPC: H01S3/10

CPC classification number: H01S3/10 ,  G03F7/70025 ,  G03F7/70041 ,  H01S3/005 ,  H01S3/09702 ,  H01S3/0971 ,  H01S3/2251 ,  H01S3/2308 ,  H01S3/2383

Abstract: Methods and systems for generating pulses of laser radiation at higher repetition rates than those of available excimer lasers are disclosed that use multiple electronic triggers for multiple laser units and arrange the timings of the different triggers with successive delays, each delay being a fraction of the interval between two successive pulses of a single laser unit. Methods and systems for exposing nanoscale patterns using such high-repetition-rate lasers are disclosed.

Abstract translation: 公开了用于以比可用的准分子激光器更高的重复率产生激光辐射脉冲的方法和系统，其使用多个激光单元的多个电子触发器并且以连续的延迟来布置不同触发的定时，每个延迟是间隔的一小部分 在单个激光单元的两个连续脉冲之间。 公开了使用这种高重复率激光器来暴露纳米尺度图案的方法和系统。

公开(公告)号：US20130250263A1

公开(公告)日：2013-09-26

申请号：US13896231

申请日：2013-05-16

Applicant: Anvik Corporation

Inventor： Kanti Jain

IPC: H01S3/10

CPC classification number: H01S3/10 ,  G03F7/70025 ,  G03F7/70041 ,  H01S3/005 ,  H01S3/09702 ,  H01S3/0971 ,  H01S3/2251 ,  H01S3/2308 ,  H01S3/2383

Abstract: Methods and systems for generating pulses of laser radiation at higher repetition rates than those of available excimer lasers are disclosed that use multiple electronic triggers for multiple laser units and arrange the timings of the different triggers with successive delays, each delay being a fraction of the interval between two successive pulses of a single laser unit. Methods and systems for exposing nanoscale patterns using such high-repetition-rate lasers are disclosed.

Abstract translation: 公开了用于以比可用的准分子激光器更高的重复率产生激光辐射脉冲的方法和系统，其使用多个激光单元的多个电子触发器并且以连续的延迟来布置不同触发的定时，每个延迟是间隔的一小部分 在单个激光单元的两个连续脉冲之间。 公开了使用这种高重复率激光器来暴露纳米尺度图案的方法和系统。