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公开(公告)号:US10438896B2
公开(公告)日:2019-10-08
申请号:US15801163
申请日:2017-11-01
Applicant: Apple Inc.
Inventor: Sanjay Dabral , Zun Zhai
IPC: H01L23/48 , H01L21/44 , H01L23/538 , H01L23/488 , H01L23/00 , H01L25/18 , H01L23/522 , H01L23/58 , H01L21/66 , H01L23/528
Abstract: Stitched die structures, and methods for interconnecting die are described. In an embodiment, a stitched die structure includes a semiconductor substrate that includes a first die first die area of a first die and a second die area of a second die separate from the first die area. A back-end-of-the-line (BEOL) build-up structure spans over the first die area and the second die area, and includes a first metallic seal directly over a first peripheral area of the first die area, a second metallic seal directly over a second peripheral area of the second die area, and a die-to-die routing extending through the first metallic seal and the second metallic seal to electrically connect the first die to the second die.
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公开(公告)号:US20180294230A1
公开(公告)日:2018-10-11
申请号:US15801163
申请日:2017-11-01
Applicant: Apple Inc.
Inventor: Sanjay Dabral , Zun Zhai
IPC: H01L23/538 , H01L23/488 , H01L23/00 , H01L25/18
CPC classification number: H01L23/5389 , H01L22/32 , H01L22/34 , H01L23/488 , H01L23/522 , H01L23/5283 , H01L23/58 , H01L24/19 , H01L24/20 , H01L24/24 , H01L24/73 , H01L24/92 , H01L25/18
Abstract: Stitched die structures, and methods for interconnecting die are described. In an embodiment, a stitched die structure includes a semiconductor substrate that includes a first die first die area of a first die and a second die area of a second die separate from the first die area. A back-end-of-the-line (BEOL) build-up structure spans over the first die area and the second die area, and includes a first metallic seal directly over a first peripheral area of the first die area, a second metallic seal directly over a second peripheral area of the second die area, and a die-to-die routing extending through the first metallic seal and the second metallic seal to electrically connect the first die to the second die.
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