公开(公告)号：US11989495B2

公开(公告)日：2024-05-21

申请号：US17139330

申请日：2020-12-31

Applicant: Applied Materials, Inc.

Inventor： Debkalpo Das ,  Raman K Nurani ,  Ramachandran Subramanian ,  Bibhavendra Singh ,  Bharath Sundar

IPC: G06F30/33 ,  G06F18/213 ,  G06F18/214 ,  H01L21/70

CPC classification number: G06F30/33 ,  G06F18/213 ,  G06F18/214 ,  H01L21/702

Abstract: A method includes obtaining sensor data associated with a deposition process performed in a process chamber to deposit film on a surface of a substrate. The method further includes generating a plurality of physics based outputs using a transformation function and the sensor data. The method further includes mapping the physics based outputs to a training set. The method further includes training a virtual model based on the training set and the sensor data, wherein the virtual model is trained to generate predictive metrology data associated with the film.

公开(公告)号：US20240249052A1

公开(公告)日：2024-07-25

申请号：US18624471

申请日：2024-04-02

Applicant: Applied Materials, Inc.

Inventor： Debkalpo Das ,  Raman K. Nurani ,  Ramachandran Subramanian ,  Bibhavendra Singh ,  Bharath Sundar

IPC: G06F30/33 ,  G06F18/213 ,  G06F18/214 ,  H01L21/70

CPC classification number: G06F30/33 ,  G06F18/213 ,  G06F18/214 ,  H01L21/702

Abstract: A method includes obtaining sensor data associated with a deposition process performed in a process chamber to deposit film on a surface of a substrate. A plurality of physics-based outputs are generated using a transformation function and the sensor data. The transformation function is used to at least one of estimate site availability for growth at an equilibrium condition for the process chamber or estimate boundary layer thickness in an equilibrium condition for the process chamber. The physics-based outputs are mapped to a training set and a virtual model is trained based on the training set and the sensor data. The virtual model is trained to generate predictive metrology data associated with the film.