公开(公告)号：US12159392B2

公开(公告)日：2024-12-03

申请号：US17753555

申请日：2020-09-14

Applicant: Applied Materials, Inc.

Inventor： Yongan Xu ,  Chan Juan Xing ,  Jinxin Fu ,  Yifei Wang ,  Ludovic Godet

IPC: G06T7/33 ,  G06T7/00

Abstract: Embodiments of the present disclosure include a die system and a method of comparing alignment vectors. The die system includes a plurality of dies arranged in a desired pattern. An alignment vector, such as a die vector, can be determined from edge features of the die. The alignment vectors can be compared to other dies or die patterns in the same system. A method of comparing dies and die patterns includes comparing die vectors and/or pattern vectors. The comparison between alignment vectors allows for fixing the die patterns for the next round of processing. The methods provided allow accurate comparisons between as-deposited edge features, such that accurate stitching of dies can be achieved.

公开(公告)号：US12085475B2

公开(公告)日：2024-09-10

申请号：US17771557

申请日：2020-12-14

Applicant: Applied Materials, Inc.

Inventor： Yongan Xu ,  Chan Juan Xing ,  Jinxin Fu ,  Ludovic Godet

IPC: G01M11/00

CPC classification number: G01M11/30

Abstract: A method and apparatus for determining a line angle and a line angle rotation of a grating or line feature is disclosed. An aspect of the present disclosure involves, measuring coordinate points of a first line feature using a measurement tool, determining a first slope of the first line feature from the coordinate points, and determining a first line angle from the slope of the first line feature. This process can be repeated to find a second slope of a second line feature that is adjacent to the first line feature. The slope of the first and second line features can be compared to find a line angle rotation. The line angle rotation is compared to a design specification and a stitch quality is determined.