公开(公告)号：USD947802S1

公开(公告)日：2022-04-05

申请号：US29735362

申请日：2020-05-20

Applicant: Applied Materials, Inc.

Designer： Clinton Sakata ,  Edward Golubovsky

公开(公告)号：USD723077S1

公开(公告)日：2015-02-24

申请号：US29475509

申请日：2013-12-03

Applicant: Applied Materials Inc.

Designer： Clinton Sakata

公开(公告)号：US10229842B2

公开(公告)日：2019-03-12

申请号：US13951913

申请日：2013-07-26

Applicant: Applied Materials, Inc.

Inventor： Clinton Sakata ,  Hui Chen ,  Jim K. Atkinson ,  Tomohiko Kitajima ,  Brian J. Brown

IPC: H01L21/67

Abstract: A buff module and method for using the same are provided. In one embodiment, a buff module includes housing having an interior volume, a plurality of drive rollers and a pair of buff heads. The drive rollers are arranged to rotate a substrate within the interior volume on a substantially horizontal axis. The buff heads are disposed in the housing, each buff head rotatable on an axis substantially aligned with the horizontal axis and movable to a position substantially parallel with the horizontal axis.