公开(公告)号：US20230002897A1

公开(公告)日：2023-01-05

申请号：US17939655

申请日：2022-09-07

Applicant: Applied Materials, Inc.

Inventor： Kenichi OHNO ,  Eric H. LIU ,  Sukti CHATTERJEE ,  Yuriy MELNIK ,  Thomas KNISLEY ,  David Alexander BRITZ ,  Lance A. SCUDDER ,  Pravin K. NARWANKAR

IPC: C23C16/455 ,  C23C16/02 ,  C23C16/56 ,  C23C16/40

Abstract: Embodiments of the present disclosure generally relate to protective coatings on substrates and methods for depositing the protective coatings. In one or more embodiments, a method of forming a protective coating on a substrate includes depositing a chromium oxide layer containing amorphous chromium oxide on a surface of the substrate during a first vapor deposition process and heating the substrate containing the chromium oxide layer comprising the amorphous chromium oxide to convert at least a portion of the amorphous chromium oxide to crystalline chromium oxide during a first annealing process. The method also includes depositing an aluminum oxide layer containing amorphous aluminum oxide on the chromium oxide layer during a second vapor deposition process and heating the substrate containing the aluminum oxide layer disposed on the chromium oxide layer to convert at least a portion of the amorphous aluminum oxide to crystalline aluminum oxide during a second annealing process.

公开(公告)号：US20170237074A1

公开(公告)日：2017-08-17

申请号：US15443821

申请日：2017-02-27

Applicant: Applied Materials, Inc.

Inventor： Sergey D. LOPATIN ,  Dmitri A. BREVNOV ,  Eric H. LIU ,  Robert Z. BACHRACH ,  Connie P. WANG

IPC: H01M4/62 ,  H01M4/36 ,  H01M4/38 ,  B05D3/00 ,  H01M4/04 ,  C25D3/56 ,  B05D1/06 ,  H01M10/0525 ,  H01M4/587

CPC classification number: H01M4/626 ,  H01M4/02 ,  H01M4/0404 ,  H01M4/0419 ,  H01M4/0452 ,  H01M4/134 ,  H01M4/1395 ,  H01M4/364 ,  H01M4/366 ,  H01M4/38 ,  H01M4/386 ,  H01M4/587 ,  H01M4/625 ,  H01M4/64 ,  H01M4/661 ,  H01M10/0525 ,  H01M2004/021 ,  H01M2004/027 ,  Y02E60/122 ,  Y02P70/54

Abstract: High capacity energy storage devices and energy storage device components, and more specifically, to a system and method for fabricating such high capacity energy storage devices and storage device components using processes that form three-dimensional porous structures are provided. In one embodiment, an anode structure for use in a high capacity energy storage device, comprising a conductive collector substrate, a three-dimensional copper-tin-iron porous conductive matrix formed on one or more surfaces of the conductive collector substrate, comprising a plurality of meso-porous structures formed over the conductive current collector, and an anodically active material deposited over the three-dimensional copper-tin-iron porous conductive matrix is provided. In certain embodiments, the three-dimensional copper-tin-iron porous conductive matrix further comprises a plurality of columnar projections formed on the conductive current collector with the plurality of meso-porous structure formed on the plurality of columnar projections.

公开(公告)号：US20220055772A1

公开(公告)日：2022-02-24

申请号：US17404823

申请日：2021-08-17

Applicant: Applied Materials, Inc.

Inventor： Sukti CHATTERJEE ,  Lance A. SCUDDER ,  Yuriy MELNIK ,  Kenichi OHNO ,  Eric H. LIU ,  David Alexander BRITZ

IPC: B64F5/30 ,  B08B7/00

Abstract: Embodiments of the present disclosure generally relate to methods for cleaning aerospace components having oxidation, corrosion, contaminants, and/or other degradations. In one or more embodiments, a cleaning method includes positioning the aerospace component into a processing region of a processing chamber, introducing hydrogen gas into the processing region, maintaining the processing region at a pressure of about 100 mTorr to about 5,000 mTorr, and heating the aerospace component at a temperature of about 500° C. to about 1,200° C. for about 0.5 hours to about 24 hours to produce a cleaned surface on the aerospace component. In other embodiments, a cleaning method includes exposing the aerospace component to ozone while maintaining the aerospace component at a temperature of about 15° C. to about 500° C. for 0.25 hours to about 24 hours to produce a cleaned surface on the aerospace component.

公开(公告)号：US20210071299A1

公开(公告)日：2021-03-11

申请号：US16670555

申请日：2019-10-31

Applicant: Applied Materials, Inc.

Inventor： Kenichi OHNO ,  Eric H. LIU ,  Sukti CHATTERJEE ,  Yuriy MELNIK ,  Thomas KNISLEY ,  David Alexander BRITZ ,  Lance A. SCUDDER ,  Pravin K. NARWANKAR

IPC: C23C16/455 ,  C23C16/02 ,  C23C16/40 ,  C23C16/56

Abstract: Embodiments of the present disclosure generally relate to protective coatings on substrates and methods for depositing the protective coatings. In one or more embodiments, a method of forming a protective coating on a substrate includes depositing a chromium oxide layer containing amorphous chromium oxide on a surface of the substrate during a first vapor deposition process and heating the substrate containing the chromium oxide layer comprising the amorphous chromium oxide to convert at least a portion of the amorphous chromium oxide to crystalline chromium oxide during a first annealing process. The method also includes depositing an aluminum oxide layer containing amorphous aluminum oxide on the chromium oxide layer during a second vapor deposition process and heating the substrate containing the aluminum oxide layer disposed on the chromium oxide layer to convert at least a portion of the amorphous aluminum oxide to crystalline aluminum oxide during a second annealing process.

公开(公告)号：US20190013513A1

公开(公告)日：2019-01-10

申请号：US16067795

申请日：2017-01-04

Applicant: Applied Materials, Inc.

Inventor： Gao LIU ,  Sergey D. LOPATIN ,  Eric H. LIU ,  Ajey M. JOSHI ,  Guo AI ,  Zhihui WANG ,  Hui ZHAO ,  Donghai WANG

IPC: H01M4/139 ,  H01M4/62 ,  H01M4/04 ,  H01M4/38 ,  H01M4/587 ,  H01M4/36 ,  H01M4/48 ,  H01M10/0525

Abstract: A simple solution processing method is developed to achieve uniform and scalable stabilized lithium metal powder coating on Li-ion negative electrode. A solvent and binder system for stabilized lithium metal powder coating is developed, including the selection of solvent, polymer binder and enhancement of polymer concentration. The enhanced binder solution is 1% concentration of polymer binder in xylene, and the polymer binder is chosen as the mixture of poly(styrene-co-butadiene) rubber (SBR) and polystyrene (PS). Long-sustained, uniformly dispersed stabilized lithium metal powder suspension can be achieved with the enhanced binder solution. A uniform stabilized lithium metal powder coating can be achieved with simple doctor blade coating method and the resulting stabilized lithium metal powder coating can firmly glued on the anode surface. With the prelithiation of negative electrode by stabilized lithium metal powder, improvements in electrochemical performances are demonstrated in both graphite/NMC and SiO/NMC full-cell.