公开(公告)号：US11856706B2

公开(公告)日：2023-12-26

申请号：US16702031

申请日：2019-12-03

Applicant: Applied Materials, Inc.

Inventor： Hsui Yang ,  Yao-Hung Yang ,  Jeevan Shanbhag ,  Chien-Min Liao ,  Earl Hunter ,  David Ganon ,  Mariana Luigi ,  Siamak Salimian ,  Tom K. Cho ,  Chun-Chung Chen

IPC: H05K13/08 ,  H01L21/67

CPC classification number: H05K13/087 ,  H01L21/67276 ,  H01L21/67294

Abstract: The present disclosure is directed to a system and method to identify and track parts of a semiconductor processing chamber, as well as the status of the parts, and store status information in a centralized location as status changes over time.