公开(公告)号：US11566319B2

公开(公告)日：2023-01-31

申请号：US15844251

申请日：2017-12-15

申请人： Applied Materials, Inc.

发明人： Jennifer Y. Sun ,  Vahid Firouzdor ,  Biraja Prasad Kanungo ,  Tom K. Cho ,  Vedapuram S. Achutharaman ,  Ying Zhang

IPC分类号： C04B41/89 ,  C04B41/00 ,  C04B41/52 ,  C04B35/505 ,  C04B35/622 ,  C04B41/45 ,  C04B35/00 ,  C23C14/08 ,  C04B41/50 ,  C23C14/46 ,  C23C14/58 ,  H01J37/32 ,  C04B41/87

摘要： An article comprises a body and a conformal protective layer on at least one surface of the body. The conformal protective layer is a plasma resistant rare earth oxide film having a thickness of less than 1000 μm, wherein the plasma resistant rare earth oxide film consists essentially of 40 mol % to less than 100 mol % of Y2O3, over 0 mol % to 60 mol % of ZrO2, and 0 mol % to 9 mol % of Al2O3.

公开(公告)号：US20180010235A1

公开(公告)日：2018-01-11

申请号：US15712094

申请日：2017-09-21

申请人： Applied Materials, Inc.

发明人： Jennifer Y. Sun ,  Vahid Firouzdor ,  Biraja Prasad Kanungo ,  Tom K. Cho ,  Vedapuram S. Achutharaman ,  Ying Zhang

IPC分类号： C23C14/08 ,  C04B35/00 ,  C04B35/505 ,  C04B35/622 ,  C04B41/50 ,  C04B41/52 ,  C04B41/87 ,  C04B41/89 ,  H01J37/32 ,  C23C14/46 ,  C23C14/58 ,  C04B41/00

CPC分类号： C23C14/088 ,  C04B35/00 ,  C04B35/505 ,  C04B35/62222 ,  C04B41/009 ,  C04B41/4529 ,  C04B41/5045 ,  C04B41/52 ,  C04B41/87 ,  C04B41/89 ,  C04B2235/3217 ,  C04B2235/3222 ,  C04B2235/3225 ,  C04B2235/3246 ,  C04B2235/3418 ,  C04B2235/3826 ,  C04B2235/3873 ,  C04B2235/428 ,  C04B2235/445 ,  C23C14/08 ,  C23C14/083 ,  C23C14/46 ,  C23C14/5806 ,  H01J37/32477 ,  Y10T428/26 ,  Y10T428/265 ,  C04B35/10 ,  C04B35/50 ,  C04B35/14 ,  C04B35/584 ,  C04B35/565 ,  C04B41/5032 ,  C04B41/5042 ,  C04B41/5035 ,  C04B2103/54

摘要： An article comprises a body and a conformal protective layer on at least one surface of the body. The conformal protective layer is a plasma resistant rare earth oxide film having a thickness of less than 1000 μm, wherein the plasma resistant rare earth oxide film is selected from a group consisting of an Er—Y composition, an Er—Al—Y composition, an Er—Y—Zr composition, and an Er—Al composition.

公开(公告)号：US20160326625A1

公开(公告)日：2016-11-10

申请号：US15211993

申请日：2016-07-15

申请人： Applied Materials, Inc.

发明人： Jennifer Y. Sun ,  Vahid Firouzdor ,  Biraja Prasad Kanungo ,  Tom K. Cho ,  Vedapuram S. Achutharaman ,  Ying Zhang

IPC分类号： C23C14/08 ,  C23C14/58 ,  C04B41/89 ,  C04B35/622 ,  C04B41/50 ,  C04B41/52 ,  C23C14/46 ,  C04B35/505

CPC分类号： C23C14/088 ,  C04B35/00 ,  C04B35/505 ,  C04B35/62222 ,  C04B41/009 ,  C04B41/4529 ,  C04B41/5045 ,  C04B41/52 ,  C04B41/87 ,  C04B41/89 ,  C04B2235/3217 ,  C04B2235/3222 ,  C04B2235/3225 ,  C04B2235/3246 ,  C04B2235/3418 ,  C04B2235/3826 ,  C04B2235/3873 ,  C04B2235/428 ,  C04B2235/445 ,  C23C14/08 ,  C23C14/083 ,  C23C14/46 ,  C23C14/5806 ,  H01J37/32477 ,  Y10T428/26 ,  Y10T428/265 ,  C04B35/10 ,  C04B35/50 ,  C04B35/14 ,  C04B35/584 ,  C04B35/565 ,  C04B41/5032 ,  C04B41/5042 ,  C04B41/5035 ,  C04B2103/54

摘要： An article comprises a body and a conformal protective layer on at least one surface of the body. The conformal protective layer is a plasma resistant rare earth oxide film having a thickness of less than 1000 μm, wherein the plasma resistant rare earth oxide is selected from a group consisting of YF3, Er4Al2O9, ErAlO3, and a ceramic compound comprising Y4Al2O9 and a solid-solution of Y2O3—ZrO2.

摘要翻译： 一种制品在身体的至少一个表面上包括主体和保形层。 共形保护层是厚度小于1000μm的耐等离子体稀土氧化物膜，其中耐等离子体稀土氧化物选自YF 3，Er 4 Al 2 O 9，ErAlO 3和包含Y 4 Al 2 O 9的陶瓷化合物和固体 Y2O3-ZrO2溶液。

公开(公告)号：US20230167540A1

公开(公告)日：2023-06-01

申请号：US18101273

申请日：2023-01-25

申请人： Applied Materials, Inc.

发明人： Jennifer Y. Sun ,  Vahid Firouzdor ,  Biraja Prasad Kanungo ,  Tom K. Cho ,  Vedapuram S. Achutharaman ,  Ying Zhang

IPC分类号： C23C14/08 ,  C04B41/50 ,  C23C14/46 ,  C23C14/58 ,  H01J37/32 ,  C04B41/87 ,  C04B41/89 ,  C04B41/00 ,  C04B41/52 ,  C04B35/505 ,  C04B35/622 ,  C04B41/45 ,  C04B35/00

CPC分类号： C23C14/088 ,  C04B35/00 ,  C04B35/505 ,  C04B35/62222 ,  C04B41/009 ,  C04B41/52 ,  C04B41/87 ,  C04B41/89 ,  C04B41/4529 ,  C04B41/5045 ,  C23C14/08 ,  C23C14/46 ,  C23C14/083 ,  C23C14/5806 ,  H01J37/32477 ,  C04B2235/428 ,  C04B2235/445 ,  C04B2235/3217 ,  C04B2235/3222 ,  C04B2235/3225 ,  C04B2235/3246 ,  C04B2235/3418 ,  C04B2235/3826 ,  C04B2235/3873 ,  Y10T428/26 ,  Y10T428/265

摘要： A method includes performing ion beam sputtering with ion assisted deposition to deposit a protective layer on a surface of a body. The protective layer is a plasma resistant rare earth-containing film of a thickness less than 1000 µm. The porosity of the protective layer is below 1%. The plasma resistant rare earth-containing film consists of 40 mol% to less than 100 mol% of Y2O3, over 0 mol% to 60 mol% of ZrO2, and 0 mol% to 9 mol% of Al2O3.

公开(公告)号：US11560913B2

公开(公告)日：2023-01-24

申请号：US16249731

申请日：2019-01-16

申请人： Applied Materials, Inc.

发明人： Govinda Raj ,  Tom K. Cho ,  Hamid Mohiuddin ,  Ian Widlow

IPC分类号： B23K1/00 ,  F16B5/08 ,  B23K1/20 ,  C04B37/02 ,  B23K101/40 ,  B23K103/00 ,  B23K103/16

摘要： Methods of forming a metallic-ceramic brazed joint are disclosed herein. The method of forming the brazed joint includes deoxidizing the surface of metallic components, assembling the joint, heating the joint to fuse the joint components, and cooling the joint. In certain embodiments, the brazed joint includes a conformal layer. In further embodiments, the brazed joint has features in order to reduce stress concentrations within the joint.

公开(公告)号：US10685819B2

公开(公告)日：2020-06-16

申请号：US15975576

申请日：2018-05-09

申请人： Applied Materials, Inc.

发明人： Ramesh Gopalan ,  Tom K. Cho ,  George Alajajian ,  Michael J. Mark

IPC分类号： H01J37/32 ,  G01N21/31 ,  G01N21/64 ,  G01N21/85 ,  G01N21/62 ,  G01N21/84 ,  H01L21/67 ,  H01L21/66 ,  G01N21/03 ,  G01N21/17

摘要： An apparatus includes a reactive species source, a spectral measurement volume, a light source to emit a light beam into the spectral measurement volume, a spectrometer to receive the light beam from the spectral measurement volume. The apparatus includes an a controller configured to, when a reactive species is present in the spectral measurement volume, control the light source to emit the light beam into the spectral measurement volume and the spectrometer to determine an environment spectrum using the light beam, and when the reactive species is not present in the spectral measurement volume, control the light source to emit the light beam into the spectral measurement volume and the spectrometer to determine a baseline spectrum using the light beam, calculate a net spectrum based on a difference between the environment spectrum and the baseline spectrum, and estimate a concentration of the reactive species based on the net spectrum.

公开(公告)号：US20180010234A1

公开(公告)日：2018-01-11

申请号：US15711885

申请日：2017-09-21

申请人： Applied Materials, Inc.

发明人： Jennifer Y. Sun ,  Vahid Firouzdor ,  Biraja Prasad Kanungo ,  Tom K. Cho ,  Vedapuram S. Achutharaman ,  Ying Zhang

IPC分类号： C23C14/08 ,  C04B35/622 ,  C04B41/00 ,  C04B41/45 ,  C04B41/52 ,  C23C14/46 ,  C04B41/87 ,  C04B41/89 ,  H01J37/32 ,  C23C14/58 ,  C04B35/505 ,  C04B41/50

CPC分类号： C23C14/088 ,  C04B35/00 ,  C04B35/505 ,  C04B35/62222 ,  C04B41/009 ,  C04B41/4529 ,  C04B41/5045 ,  C04B41/52 ,  C04B41/87 ,  C04B41/89 ,  C04B2235/3217 ,  C04B2235/3222 ,  C04B2235/3225 ,  C04B2235/3246 ,  C04B2235/3418 ,  C04B2235/3826 ,  C04B2235/3873 ,  C04B2235/428 ,  C04B2235/445 ,  C23C14/08 ,  C23C14/083 ,  C23C14/46 ,  C23C14/5806 ,  H01J37/32477 ,  Y10T428/26 ,  Y10T428/265 ,  C04B35/10 ,  C04B35/50 ,  C04B35/14 ,  C04B35/584 ,  C04B35/565 ,  C04B41/5032 ,  C04B41/5042 ,  C04B41/5035 ,  C04B2103/54

摘要： An article comprises a body and a conformal protective layer on at least one surface of the body. The conformal protective layer is a plasma resistant rare earth oxide film having a thickness of less than 1000 μm, wherein the plasma resistant rare earth oxide is selected from a group consisting of YF3, Er4Al2O9, ErAlO3, and a ceramic compound comprising Y4Al2O9 and a solid-solution of Y2O3—ZrO2.

公开(公告)号：US09761416B2

公开(公告)日：2017-09-12

申请号：US14200077

申请日：2014-03-07

申请人： Applied Materials, Inc.

发明人： Andrew Nguyen ,  Bradley Howard ,  Shahid Rauf ,  Ajit Balakrishna ,  Tom K. Cho ,  Kenneth S. Collins ,  Anand Kumar ,  Michael D. Willwerth ,  Yogananda Sarode Vishwanath

IPC分类号： B01D45/00 ,  H01J37/32 ,  B01D45/08 ,  B32B1/02 ,  B29C65/00

CPC分类号： H01J37/32495 ,  B01D45/08 ,  B29C66/71 ,  B32B1/02 ,  H01J37/32449 ,  H01J37/32477 ,  H01J37/32871 ,  Y10T428/13

摘要： Embodiments of the present disclosure generally provide various apparatus and methods for reducing particles in a semiconductor processing chamber. One embodiment of present disclosure provides a vacuum screen assembly disposed over a vacuum port to prevent particles generated by the vacuum pump from entering substrate processing regions. Another embodiment of the present disclosure provides a perforated chamber liner around a processing region of the substrate. Another embodiment of the present disclosure provides a gas distributing chamber liner for distributing a cleaning gas around the substrate support under the substrate supporting surface.

公开(公告)号：US11532466B2

公开(公告)日：2022-12-20

申请号：US16933922

申请日：2020-07-20

申请人： Applied Materials, Inc.

发明人： Chien-Min Liao ,  Yao-Hung Yang ,  Tom K. Cho ,  Siamak Salimian ,  Hsiu Yang ,  Chun-Chung Chen

IPC分类号： H01J37/32

摘要： Certain embodiments provide a method and non-transitory computer readable medium having instructions that, when executed by a processor of a processing system, cause the processing system to perform a method for improving operation of a semiconductor processing system. The method of part life estimation generally includes obtaining a chamber part having a first surface portion and second surface portion. A data matrix in the first portion of the chamber part is read. The data matrix has raised features. The first portion of the chamber part is cleaned. Wear on the raised features is evaluated. The part is discarded in response to the wear on the raised feature.

公开(公告)号：US11359722B2

公开(公告)日：2022-06-14

申请号：US16517299

申请日：2019-07-19

申请人： Applied Materials, Inc.

发明人： Shagun P. Maheshwari ,  Yao-Hung Yang ,  King F. Lee ,  Andrew Yu ,  Aniruddha Pal ,  Tom K. Cho ,  Chien-Min Liao

IPC分类号： F16J15/02

摘要： A sealing member is provided, including a plurality of nodes and a plurality of antinodes. Each sealing member can be rotated to expose nondamaged lobes for sealing, and prevents the sealing member from falling out of the lobed groove. A chamber is provided, including a groove that the sealing member is placed in. A method of rotating and placing the sealing member is provided, including a rotation to expose nondamaged portions of the sealing member.