公开(公告)号：US20250027887A1

公开(公告)日：2025-01-23

申请号：US18742909

申请日：2024-06-13

Applicant: Applied Materials, Inc.

Inventor： Srikanth V. Racherla ,  Ashish Singh Raichur ,  Jaeyoung Kim ,  Makoto Inagawa

IPC: G01N21/956 ,  G01N21/88 ,  G01N21/95 ,  G01N35/00

Abstract: A load lock system including an imaging subsystem and an image processing subsystem to capture comprehensive data of a substrate within a load lock chamber. The imaging subsystem can include multiple imaging elements (e.g. cameras or image sensors), to capture image data of a substrate. The image processing subsystem can process the image data with a number of computer vision, or feature extraction techniques to identify nonconformities associated with the substrate. These nonconformities can include chips, breaks, scratch, placement errors, orientation errors, or a number of other errors associated with the substrate and substrate components. The image processing subsystem can further output a message indicating any one of these errors have occurred.

公开(公告)号：US10043693B1

公开(公告)日：2018-08-07

申请号：US15615456

申请日：2017-06-06

Applicant: Applied Materials, Inc.

Inventor： Jaeyoung Kim ,  James Hoffman ,  Atsushi Kitani ,  Young Taek Kwon

IPC: H01L21/67 ,  H01L21/677 ,  H01L21/02 ,  H01L21/683 ,  H01L21/66

Abstract: Implementations described herein generally relate to a method and apparatus for processing substrates in a processing system. The method includes identifying, in a buffer chamber coupled to a transfer chamber of a processing system, a first substrate that has been in the buffer chamber longer than a predetermined duration and identifying a first destination chamber of the processing system for the first substrate. After identifying the first substrate, a buffer chamber time-out operation is performed. The buffer time out operation includes suspending movement of substrates from a load lock chamber to the transfer chamber and removing the first substrate from the buffer chamber.