公开(公告)号：US20020145113A1

公开(公告)日：2002-10-10

申请号：US09832276

申请日：2001-04-09

Applicant: Applied Materials, Inc.

Inventor： Jeffrey Sullivan ,  Marian Mankos ,  Lawrence Muray ,  Andres Fernandez ,  Steven Coyle

IPC: G21K007/00

CPC classification number: B82Y10/00 ,  B82Y40/00 ,  H01J37/3174 ,  H01J2237/2482 ,  H01J2237/31774 ,  H01J2237/31793

Abstract: An electron beam imaging apparatus capable of projecting an electron beam image on a substrate comprises a vacuum chamber having a wall and a substrate support. An electron beam source, modulator, and scanner is provided to generate, modulate, and scan one or more electron beams across the substrate. A controller is capable of generating or receiving an electrical signal to communicate with the electron beam source, modulator or scanner. One or more signal convertors are capable of converting the electrical signal to an optical signal and vice versa, the signal convertors located on either side of the wall. An optical signal carrier is capable of transmitting the optical signal through the wall of the chamber

Abstract translation: 能够将电子束图像投影在基板上的电子束成像装置包括具有壁和基板支撑件的真空室。 提供电子束源，调制器和扫描器以产生，调制和扫描穿过衬底的一个或多个电子束。 控制器能够产生或接收与电子束源，调制器或扫描仪通信的电信号。 一个或多个信号转换器能够将电信号转换为光信号，反之亦然，信号转换器位于壁的任一侧。 光信号载体能够通过腔室的壁传输光信号