公开(公告)号：US20020145113A1

公开(公告)日：2002-10-10

申请号：US09832276

申请日：2001-04-09

Applicant: Applied Materials, Inc.

Inventor： Jeffrey Sullivan ,  Marian Mankos ,  Lawrence Muray ,  Andres Fernandez ,  Steven Coyle

IPC: G21K007/00

CPC classification number: B82Y10/00 ,  B82Y40/00 ,  H01J37/3174 ,  H01J2237/2482 ,  H01J2237/31774 ,  H01J2237/31793

Abstract: An electron beam imaging apparatus capable of projecting an electron beam image on a substrate comprises a vacuum chamber having a wall and a substrate support. An electron beam source, modulator, and scanner is provided to generate, modulate, and scan one or more electron beams across the substrate. A controller is capable of generating or receiving an electrical signal to communicate with the electron beam source, modulator or scanner. One or more signal convertors are capable of converting the electrical signal to an optical signal and vice versa, the signal convertors located on either side of the wall. An optical signal carrier is capable of transmitting the optical signal through the wall of the chamber

Abstract translation: 能够将电子束图像投影在基板上的电子束成像装置包括具有壁和基板支撑件的真空室。 提供电子束源，调制器和扫描器以产生，调制和扫描穿过衬底的一个或多个电子束。 控制器能够产生或接收与电子束源，调制器或扫描仪通信的电信号。 一个或多个信号转换器能够将电信号转换为光信号，反之亦然，信号转换器位于壁的任一侧。 光信号载体能够通过腔室的壁传输光信号

公开(公告)号：US20040108812A1

公开(公告)日：2004-06-10

申请号：US10316970

申请日：2002-12-10

Applicant: Applied Materials, Inc.

Inventor： Gordon Janaway ,  Steven Coyle

IPC: H01J040/06

CPC classification number: H01J37/073 ,  H01J2237/2817

Abstract: An electron beam source has a photocathode with a photoemitter material having a work function, and with a beam receiving portion and an electron emitting portion. A first light source directs a first light beam onto the beam receiving portion of the photocathode to generate an electron beam from the electron emitting portion. The first light beam has a wavelength null1 such that hc/null1 is at least about the work function of the photoemitter material, where nullhnull is Planck's constant and nullcnull is the speed of light. A second light source directs a second light beam onto the beam receiving portion of the photocathode, such as onto the beam receiving portion, to stabilize the electron beam. The second light beam having a wavelength null2 such that hc/null2 is less than about the work function of the photoemitter material.

Abstract translation: 电子束源具有具有功函数的光发射体材料的光电阴极和具有光束接收部分和电子发射部分的光电阴极。 第一光源将第一光束引导到光电阴极的光束接收部分上，以从电子发射部分产生电子束。 第一光束具有波长λ1，使得hc /λ1至少约为光电探测器材料的功函数，其中“h”为普朗克常数，“c”为光速。 第二光源将第二光束引导到光电阴极的光束接收部分，例如到光束接收部分上，以稳定电子束。 第二光束具有波长λ2，使得hc /λ2小于光发射器材料的功函数。