公开(公告)号：US20240290593A1

公开(公告)日：2024-08-29

申请号：US18214498

申请日：2023-06-26

Applicant: Applied Materials, Inc.

Inventor： Cory LAFOLLETT ,  Jie J. ZHANG

IPC: H01J37/34 ,  C23C14/35

CPC classification number: H01J37/3452 ,  C23C14/35 ,  H01J37/3405 ,  H01J37/3455 ,  H01J2237/332

Abstract: A magnet assembly for a magnetron of a processing chamber includes a support member. A plurality of magnetic tracks is mounted to the support member. Each magnetic track includes a pair of magnetic poles. A partial magnetic track is mounted to the support member. The partial magnetic track includes a single unpaired magnetic pole. The partial magnetic track is mounted proximal to a center of rotation of the support member.