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公开(公告)号：US09698041B2
公开(公告)日：2017-07-04
申请号：US14299850
申请日：2014-06-09
Applicant: Applied Materials, Inc.
Inventor： Matthew Busche , Wendell Boyd, Jr. , Vijay D. Parkhe , Michael R. Rice , Leon Volfovski
IPC: H01L21/687 , H01L21/67
CPC classification number: H01L21/68714 , H01L21/67103 , H01L21/67109 , H01L21/67115 , H01L21/67248
Abstract: Substrate temperature control apparatus including optical fiber temperature control are described. Substrate temperature control apparatus includes a base, a thermal contact member proximate to the base, and a plurality of optical fibers adapted to provide light-based heating extending laterally between the base and thermal contact member. Substrate temperature control systems and electronic device processing systems and methods including optical fiber temperature control are described, as are numerous other aspects.
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2.发明授权Control systems employing deflection sensors to control clamping forces applied by electrostatic chucks, and related methods 有权使用偏转传感器控制由静电卡盘施加的夹紧力的控制系统及相关方法公开(公告)号：US09558981B2
公开(公告)日：2017-01-31
申请号：US14158112
申请日：2014-01-17
Applicant: Applied Materials, Inc.
Inventor： Wendell Boyd, Jr. , Vijay D. Parkhe , Matthew Busche , Konstantin Makhratchev , Masanori Ono , Senh Thach
IPC: H01L21/683 , H01L21/67
CPC classification number: H01L21/6833 , H01L21/67288
Abstract: A control system that includes deflection sensors which can control clamping forces applied by electrostatic chucks, and related methods are disclosed. By using a sensor to determine a deflection of a workpiece supported by an electrostatic chuck, a control system may use the deflection measured to control a clamping force applied to the workpiece by the electrostatic chuck. The control system applies a clamping voltage to the electrostatic chuck so that the clamping force reaches and maintains a target clamping force. In this manner, the clamping force may secure the workpiece to the electrostatic chuck to enable manufacturing operations to be performed while preventing workpiece damage resulting from unnecessary higher values of the clamping force.
Abstract translation: 公开了一种包括能够控制由静电卡盘施加的夹持力的偏转传感器的控制系统及相关方法。 通过使用传感器来确定由静电卡盘支撑的工件的偏转，控制系统可以使用测量的偏转来控制由静电卡盘施加到工件的夹紧力。 控制系统对静电卡盘施加钳位电压，使得夹紧力达到并保持目标夹紧力。 以这种方式，夹紧力可以将工件固定到静电卡盘，以使得能够进行制造操作，同时防止由于不必要的较高的夹紧力而导致的工件损坏。
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公开(公告)号：US10736182B2
公开(公告)日：2020-08-04
申请号：US14738448
申请日：2015-06-12
Applicant: Applied Materials, Inc.
Inventor： Matthew Busche , Wendell Boyd, Jr. , Todd J. Egan , Gregory L. Kirk , Vijay D. Parkhe , Michael R. Rice , Leon Volfovski
Abstract: Substrate temperature control apparatus and electronic device manufacturing systems provide pixelated light-based heating to a substrate in a process chamber. A substrate holder in the process chamber may include a baseplate. The baseplate has a top surface that may have a plurality of cavities and a plurality of grooves connected to the cavities. Optical fibers may be received in the grooves such that each cavity has a respective optical fiber terminating therein to transfer light thereto. Some or all of the cavities may have an epoxy optical diffuser disposed therein to diffuse light provided by the optical fiber. A ceramic plate upon which a substrate may be placed may be bonded to the baseplate. A thermal spreader plate may optionally be provided between the baseplate and the ceramic plate. Methods of controlling temperature across a substrate holder in an electronic device manufacturing system are also provided, as are other aspects.
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公开(公告)号：US09986598B2
公开(公告)日：2018-05-29
申请号：US14737799
申请日：2015-06-12
Applicant: Applied Materials, Inc.
Inventor： Matthew Busche , Wendell Boyd, Jr. , Dmitry A. Dzilno , Vijay D. Parkhe , Michael R. Rice , Leon Volfovski
CPC classification number: H05B3/0047 , H01L21/67103 , H01L21/67248 , H05B1/0233
Abstract: Substrate temperature control apparatus including groove-routed optical fibers. Substrate temperature control apparatus includes upper and lower members including grooves in one or both, and a plurality of optical fibers routed in the grooves. In one embodiment, the optical fibers are adapted to provide light-based pixelated heating. In another embodiment, embedded optical temperature sensors are adapted to provide temperature measurement. Substrate temperature control systems, electronic device processing systems, and methods including groove-routed optical fiber temperature control and measurement are described, as are numerous other aspects.
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Patent Agency Ranking
5.发明申请公开(公告)号：US20150357228A1
公开(公告)日：2015-12-10
申请号：US14299850
申请日：2014-06-09
Applicant: Applied Materials, Inc.
Inventor： Matthew Busche , Wendell Boyd, JR. , Vijay D. Parkhe , Michael R. Rice , Leon Volfovski
IPC: H01L21/687 , H01L21/67
CPC classification number: H01L21/68714 , H01L21/67103 , H01L21/67109 , H01L21/67115 , H01L21/67248
Abstract: Substrate temperature control apparatus including optical fiber temperature control are described. Substrate temperature control apparatus includes a base, a thermal contact member proximate to the base, and a plurality of optical fibers adapted to provide light-based heating extending laterally between the base and thermal contact member. Substrate temperature control systems and electronic device processing systems and methods including optical fiber temperature control are described, as are numerous other aspects.
Abstract translation: 描述了包括光纤温度控制的基板温度控制装置。 基板温度控制装置包括基座，靠近基座的热接触构件以及适于提供在基座和热接触构件之间横向延伸的基于光的加热的多个光纤。 与许多其他方面一样，描述了基板温度控制系统和包括光纤温度控制的电子设备处理系统和方法。
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6.发明授权公开(公告)号：US10520371B2
公开(公告)日：2019-12-31
申请号：US14920758
申请日：2015-10-22
Applicant: Applied Materials, Inc.
Inventor： Matthew Busche
IPC: G01K11/32 , C03C25/16 , G02B6/26 , G02B6/255 , C03C25/1065
Abstract: An optical fiber temperature sensor including a lead-in fiber and black body emitter. The lead-in optical fiber includes a fiber end, and the black body emitter is fused on the fiber end, wherein the black body emitter is made up of a melted high emissivity material included integrally in melted silica. Further embodiments include temperature monitoring apparatus with one or more optical fiber temperature sensors, and electronic device processing apparatus including optical fiber temperature monitoring. Numerous other aspects and embodiments are included.
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7.发明申请APPARATUS, SYSTEMS, AND METHODS FOR TEMPERATURE CONTROL OF SUBSTRATES USING EMBEDDED FIBER OPTICS AND EPOXY OPTICAL DIFFUSERS 审中-公开使用嵌入式光纤和环氧光学扩散器的基板温度控制的装置，系统和方法公开(公告)号：US20160007412A1
公开(公告)日：2016-01-07
申请号：US14738448
申请日：2015-06-12
Applicant: Applied Materials, Inc.
Inventor： Matthew Busche , Wendell Boyd, JR. , Todd J. Egan , Gregory L. Kirk , Vijay D. Parkhe , Michael R. Rice , Leon Volfovski
Abstract: Substrate temperature control apparatus and electronic device manufacturing systems provide pixelated light-based heating to a substrate in a process chamber. A substrate holder in the process chamber may include a baseplate. The baseplate has a top surface that may have a plurality of cavities and a plurality of grooves connected to the cavities. Optical fibers may be received in the grooves such that each cavity has a respective optical fiber terminating therein to transfer light thereto. Some or all of the cavities may have an epoxy optical diffuser disposed therein to diffuse light provided by the optical fiber. A ceramic plate upon which a substrate may be placed may be bonded to the baseplate. A thermal spreader plate may optionally be provided between the baseplate and the ceramic plate. Methods of controlling temperature across a substrate holder in an electronic device manufacturing system are also provided, as are other aspects.
Abstract translation: 基板温度控制装置和电子装置制造系统向处理室中的基板提供像素化的基于光的加热。 处理室中的衬底保持器可以包括底板。 底板具有可以具有多个空腔的顶表面和连接到空腔的多个凹槽。 光纤可以被容纳在槽中，使得每个空腔具有终止于其中的相应光纤以将光传送到其上。 一些或所有空腔可以具有设置在其中的环氧光学漫射器以漫射由光纤提供的光。 可以将衬底放置在其上的陶瓷板可以结合到基板。 可以可选地在基板和陶瓷板之间设置散热板。 还提供了在电子设备制造系统中控制衬底保持器温度的方法，以及其他方面。
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8.发明申请TEMPERATURE CONTROL APPARATUS INCLUDING GROOVE-ROUTED OPTICAL FIBER HEATING, SUBSTRATE TEMPERATURE CONTROL SYSTEMS, ELECTRONIC DEVICE PROCESSING SYSTEMS, AND PROCESSING METHODS 有权温度控制装置，包括光栅加热光纤加热，基板温度控制系统，电子设备处理系统和处理方法公开(公告)号：US20160007411A1
公开(公告)日：2016-01-07
申请号：US14737799
申请日：2015-06-12
Applicant: Applied Materials, Inc.
Inventor： Matthew Busche , Wendell Boyd, JR. , Dmitry A. Dzilno , Vijay D. Parkhe , Michael R. Rice , Leon Volfovski
CPC classification number: H05B3/0047 , H01L21/67103 , H01L21/67248 , H05B1/0233
Abstract: Substrate temperature control apparatus including groove-routed optical fibers. Substrate temperature control apparatus includes upper and lower members including grooves in one or both, and a plurality of optical fibers routed in the grooves. In one embodiment, the optical fibers are adapted to provide light-based pixelated heating. In another embodiment, embedded optical temperature sensors are adapted to provide temperature measurement. Substrate temperature control systems, electronic device processing systems, and methods including groove-routed optical fiber temperature control and measurement are described, as are numerous other aspects.
Abstract translation: 基板温度控制装置，包括槽路布置的光纤。 衬底温度控制装置包括上部和下部构件，其包括一个或两个中的凹槽，以及在凹槽中布置的多个光纤。 在一个实施例中，光纤适于提供基于光的像素化加热。 在另一个实施例中，嵌入式光学温度传感器适于提供温度测量。 还描述了基板温度控制系统，电子设备处理系统以及包括沟道布线的光纤温度控制和测量的方法。
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9.发明申请公开(公告)号：US20170115169A1
公开(公告)日：2017-04-27
申请号：US14920758
申请日：2015-10-22
Applicant: Applied Materials, Inc.
Inventor： Matthew Busche
Abstract: An optical fiber temperature sensor including a lead-in fiber and black body emitter. The lead-in optical fiber includes a fiber end, and the black body emitter is fused on the fiber end, wherein the black body emitter is made up of a melted high emissivity material included integrally in melted silica. Further embodiments include temperature monitoring apparatus with one or more optical fiber temperature sensors, and electronic device processing apparatus including optical fiber temperature monitoring. Numerous other aspects and embodiments are included.
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