公开(公告)号：US20040069651A1

公开(公告)日：2004-04-15

申请号：US10273044

申请日：2002-10-15

Applicant: Applied Materials, Inc.

Inventor： Harald Herchen ,  Henan Hao ,  Timothy R. Webb ,  Quyen Pham ,  Son N. Trinh ,  Deenesh Padhi

IPC: C25D005/34

CPC classification number: C25D7/123 ,  C25D5/34

Abstract: Method and apparatus for electrodepositing a metal onto a substrate. An oxide treatment process is performed on a substrate prior to making electrical contact between a seed layer of the substrate and a conductive contact element which provides a current. In one embodiment, the pressure at the interface between the seed layer and the conductive contact element is controlled to avoid detrimentally affecting a material(s) of the substrate.

Abstract translation: 将金属电沉积到基底上的方法和装置。 在衬底的晶种层和提供电流的导电接触元件之间进行电接触之前，在衬底上进行氧化物处理工艺。 在一个实施例中，控制种子层和导电接触元件之间的界面处的压力，以避免不利地影响衬底的材料。

公开(公告)号：US20040140797A1

公开(公告)日：2004-07-22

申请号：US10685210

申请日：2003-10-14

Applicant: Applied Materials, Inc.

Inventor： Lawrence C. Lei ,  Siqing Lu ,  Yu Chang ,  Cecilia Martner ,  Quyen Pham ,  Yu Ping Gu ,  Joel Huston ,  Paul Smith ,  Gabriel Lorimer Miller

IPC: G01B007/06 ,  G01N027/72

CPC classification number: G01B7/105

Abstract: A method and apparatus are provided for measuring the thickness of a test object. The apparatus includes an eddy current sensor having first and second sensor heads. The sensor heads are positioned to have a predetermined gap therebetween for passage by at least a portion of the test object through the gap. The sensor heads make measurements at given sampling locations on the test object as the test object is moved through the gap. The apparatus also includes a position sensing mechanism to determine positions of the sampling locations on the test object. The apparatus also includes an evaluation circuit in communication with the eddy current sensor and to the position sensing mechanism for determining the thickness of the test object at the sampling locations.

Abstract translation: 提供了一种用于测量被测物体的厚度的方法和装置。 该装置包括具有第一和第二传感器头的涡流传感器。 传感器头被定位成在其间具有预定的间隙，以通过该测试对象的至少一部分通过间隙。 当测试对象移动穿过间隙时，传感器头在测试对象上的给定采样位置进行测量。 该装置还包括位置检测机构，用于确定测试对象上的采样位置的位置。 该装置还包括与涡流传感器和位置感测机构通信的评估电路，用于确定采样位置处的测试对象的厚度。