公开(公告)号：US11217433B2

公开(公告)日：2022-01-04

申请号：US16152928

申请日：2018-10-05

Applicant: APPLIED Materials, Inc.

Inventor： Robert J. Mitchell ,  Guillermo Colom

IPC: H01J37/32 ,  H01L21/67 ,  H01L21/687

Abstract: Disclosed is a rotary union including an inner shaft, wherein the inner shaft is rotatable and includes an internal channel operable to deliver a cryogenic fluid to a platen. The rotary union may further include a rotary union shaft surrounding the inner shaft, and a seal assembly coupled to the rotary union shaft. The seal assembly may include a support, a metal bellows extending around an exterior of the support, and a seal support coupled to the metal bellows, wherein the seal support extends around the support. The seal assembly may further include a non-rotating seal component seated in the seal support, and a rotating seal component in abutment with the non-rotating seal component to create a mechanical seal therebetween.

公开(公告)号：US10971327B1

公开(公告)日：2021-04-06

申请号：US16705634

申请日：2019-12-06

Applicant: APPLIED Materials, Inc.

Inventor： Robert J. Mitchell

IPC: H01J37/20 ,  C23C14/54 ,  C23C14/48 ,  H01J37/317

Abstract: A cryogenic heat transfer system including a platen supported by a rotatable shaft, a housing surrounding a portion of the rotatable shaft, the housing including an annular heat sink surrounding the rotatable shaft and defining a heat transfer gap between the heat sink and the rotatable shaft, the heat sink including a fluid conduit extending therethrough for circulating a first cooling fluid through the heat sink, a first dynamic seal arrangement extending from a first axial end of the heat sink and surrounding the rotatable shaft, and a second dynamic seal arrangement extending from a second axial end of the heat sink opposite the first axial end and radially surrounding the rotatable shaft, wherein the heat sink and the first and second dynamic seal arrangements define a fluidically sealed volume surrounding the rotatable shaft, the fluidically sealed volume containing a second cooling fluid.

公开(公告)号：US20230287561A1

公开(公告)日：2023-09-14

申请号：US17694028

申请日：2022-03-14

Applicant: Applied Materials, Inc.

Inventor： Stanislav S. Todorov ,  Robert J. Mitchell ,  Joseph C. Olson ,  Frank Sinclair

IPC: C23C14/48 ,  C23C14/50

CPC classification number: C23C14/48 ,  C23C14/505

Abstract: A system comprising a spinning disk is disclosed. The system comprises a semiconductor processing system, such as a high energy implantation system. The semiconductor processing system produces a spot ion beam, which is directed to a plurality of workpieces, which are disposed on the spinning disk. The spinning disk comprises a rotating central hub with a plurality of platens. The spinning disk rotates about a central axis. The spinning disk is also translated linearly in a directional perpendicular to the central axis. The spot ion beam strikes the spinning disk at a distance from the central axis, referred to as the radius of impact. The rotation rate and the scan velocity may both vary inversely with the radius of impact.