公开(公告)号：US11149345B2

公开(公告)日：2021-10-19

申请号：US15838314

申请日：2017-12-11

Applicant: APPLIED MATERIALS, INC.

Inventor： Shardul Patel ,  Robert Mitchell

IPC: C23C14/50 ,  C23C16/46 ,  C23C16/458 ,  H01J37/32 ,  H01J37/34 ,  H01L21/02 ,  H01L21/687 ,  H02N13/00 ,  H01L21/683 ,  H01L21/67

Abstract: Embodiments of the present disclosure relate to a rotatable electrostatic chuck. In some embodiments, a rotatable electrostatic chuck includes a dielectric disk having at least one chucking electrode and a plurality of coolant channels; a cryogenic manifold coupled to the dielectric disk and having a coolant inlet and a coolant outlet both of which are fluidly coupled to the plurality of coolant channels; a shaft assembly coupled to the cryogenic manifold; a cryogenic supply chamber coupled to the shaft assembly; a supply tube coupled to the cryogenic supply chamber and to the coolant inlet to supply the cryogenic medium to the plurality of coolant channels, wherein the supply tube extends through the central opening of the shaft assembly; and a return tube coupled to the coolant outlet and to the cryogenic supply chamber, wherein the supply tube is disposed within the return tube.

公开(公告)号：US20230386785A1

公开(公告)日：2023-11-30

申请号：US17827204

申请日：2022-05-27

Applicant: Applied Materials, Inc.

Inventor： Tyler Wills ,  George M. Gammel ,  Eric Donald Wilson ,  Jay T. Scheuer ,  Xiangdong He ,  Shardul Patel ,  Robert C. Lindberg

IPC: H01J37/304 ,  H01J37/317

CPC classification number: H01J37/3045 ,  H01J37/3171 ,  H01J2237/24405 ,  H01J2237/30483 ,  H01J2237/30477

Abstract: Provided herein are approaches for optimizing a full horizontal scanned beam distance of an accelerator beam. In one approach, a method may include positioning a first Faraday cup along a first side of an intended beam-scan area, positioning a second Faraday cup along a second side of the intended beam-scan area, scanning an ion beam along the first and second sides of the intended beam-scan area, measuring a first beam current of the ion beam at the first Faraday cup and measuring a second beam current of the ion beam at the second Faraday cup, and determining an optimal scan distance of the ion beam across the intended beam-scan area based on the first beam current and the second beam current.

公开(公告)号：US12191113B2

公开(公告)日：2025-01-07

申请号：US17827204

申请日：2022-05-27

Applicant: Applied Materials, Inc.

Inventor： Tyler Wills ,  George M. Gammel ,  Eric Donald Wilson ,  Jay T. Scheuer ,  Xiangdong He ,  Shardul Patel ,  Robert C. Lindberg

IPC: H01J37/304 ,  H01J37/317

Abstract: Provided herein are approaches for optimizing a full horizontal scanned beam distance of an accelerator beam. In one approach, a method may include positioning a first Faraday cup along a first side of an intended beam-scan area, positioning a second Faraday cup along a second side of the intended beam-scan area, scanning an ion beam along the first and second sides of the intended beam-scan area, measuring a first beam current of the ion beam at the first Faraday cup and measuring a second beam current of the ion beam at the second Faraday cup, and determining an optimal scan distance of the ion beam across the intended beam-scan area based on the first beam current and the second beam current.