公开(公告)号：US12191113B2

公开(公告)日：2025-01-07

申请号：US17827204

申请日：2022-05-27

Applicant: Applied Materials, Inc.

Inventor： Tyler Wills ,  George M. Gammel ,  Eric Donald Wilson ,  Jay T. Scheuer ,  Xiangdong He ,  Shardul Patel ,  Robert C. Lindberg

IPC: H01J37/304 ,  H01J37/317

Abstract: Provided herein are approaches for optimizing a full horizontal scanned beam distance of an accelerator beam. In one approach, a method may include positioning a first Faraday cup along a first side of an intended beam-scan area, positioning a second Faraday cup along a second side of the intended beam-scan area, scanning an ion beam along the first and second sides of the intended beam-scan area, measuring a first beam current of the ion beam at the first Faraday cup and measuring a second beam current of the ion beam at the second Faraday cup, and determining an optimal scan distance of the ion beam across the intended beam-scan area based on the first beam current and the second beam current.

公开(公告)号：US20240071719A1

公开(公告)日：2024-02-29

申请号：US17897719

申请日：2022-08-29

Applicant: Applied Materials, Inc.

Inventor： Tyler Wills ,  Richard Allen Sprenkle

IPC: H01J37/317 ,  H01J37/304

CPC classification number: H01J37/3171 ,  H01J37/304 ,  H01J2237/24405 ,  H01J2237/24564 ,  H01J2237/30483

Abstract: A system and method for creating a beam current profile that eliminates variations that are not position dependent is disclosed. The system includes two Faraday sensors; one which is moved across the ion beam and a second that remains at or near a certain location. The reference Faraday sensor is used to measure temporal variations in the beam current, while the movable Faraday sensor measures both the position dependent variations and the temporal variations. By combining these measurements, the actual position dependent variations of the scanned ion beam can be determined. This resultant beam current profile can then be used to control the scan speed of the electrostatic or magnetic scanner.

公开(公告)号：US12283460B2

公开(公告)日：2025-04-22

申请号：US17897719

申请日：2022-08-29

Applicant: Applied Materials, Inc.

Inventor： Tyler Wills ,  Richard Allen Sprenkle

IPC: H01J37/317 ,  H01J37/304

Abstract: A system and method for creating a beam current profile that eliminates variations that are not position dependent is disclosed. The system includes two Faraday sensors; one which is moved across the ion beam and a second that remains at or near a certain location. The reference Faraday sensor is used to measure temporal variations in the beam current, while the movable Faraday sensor measures both the position dependent variations and the temporal variations. By combining these measurements, the actual position dependent variations of the scanned ion beam can be determined. This resultant beam current profile can then be used to control the scan speed of the electrostatic or magnetic scanner.

公开(公告)号：US20230386785A1

公开(公告)日：2023-11-30

申请号：US17827204

申请日：2022-05-27

Applicant: Applied Materials, Inc.

Inventor： Tyler Wills ,  George M. Gammel ,  Eric Donald Wilson ,  Jay T. Scheuer ,  Xiangdong He ,  Shardul Patel ,  Robert C. Lindberg

IPC: H01J37/304 ,  H01J37/317

CPC classification number: H01J37/3045 ,  H01J37/3171 ,  H01J2237/24405 ,  H01J2237/30483 ,  H01J2237/30477

Abstract: Provided herein are approaches for optimizing a full horizontal scanned beam distance of an accelerator beam. In one approach, a method may include positioning a first Faraday cup along a first side of an intended beam-scan area, positioning a second Faraday cup along a second side of the intended beam-scan area, scanning an ion beam along the first and second sides of the intended beam-scan area, measuring a first beam current of the ion beam at the first Faraday cup and measuring a second beam current of the ion beam at the second Faraday cup, and determining an optimal scan distance of the ion beam across the intended beam-scan area based on the first beam current and the second beam current.