公开(公告)号：US20240227081A1

公开(公告)日：2024-07-11

申请号：US18614234

申请日：2024-03-22

Applicant: Applied Materials, Inc.

Inventor： Mahendran CHIDAMBARAM ,  Shmuel EREZ ,  Wei-Sheng LEI ,  John RUSCONI

IPC: B23K26/362 ,  B23K26/06 ,  B23K103/00

CPC classification number: B23K26/362 ,  B23K26/0643 ,  B23K26/0648 ,  B23K2103/50

Abstract: A system for fabricating devices includes a plurality of stages, each stage disposed below a corresponding optical head of a plurality of movable optical heads, each optical head corresponding to a laser source, each optical head comprising a swappable optical head positioned in a staggered position relative to one another such that each laser beam path of each optical head from each corresponding laser source does not intersect one another, a conveyor system coupled to the plurality of stages, and a sorting system comprising a robot capable of moving devices from the conveyor system to at least one backend storage port or to a backend processor.

公开(公告)号：US20210276129A1

公开(公告)日：2021-09-09

申请号：US17183777

申请日：2021-02-24

Applicant: Applied Materials, Inc.

Inventor： Mahendran CHIDAMBARAM ,  Shmuel EREZ ,  Wei-Sheng LEI ,  John RUSCONI

IPC: B23K26/362 ,  B23K26/06

Abstract: A process of producing optical devices is provided including transferring a first substrate comprising one or more devices to a laser dicing tool, the laser dicing tool including a filamentation stage and a singulation stage. One or more device contours are created on the first substrate in the filamentation stage. The optical devices are singulated from the first substrate along the one or more device contours in the singulation stage. The devices are transferred to storage or for further backend processing.