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公开(公告)号:US20240381753A1
公开(公告)日:2024-11-14
申请号:US18649723
申请日:2024-04-29
Applicant: Applied Materials, Inc.
Inventor: Yongkee Chae , Xun Li , Jun-Nan Liu , Shinobu Abe , Cheng-Pei Ouyang , Su-Ho Cho , Yong Jin Kim , Thomas Werner Zilbauer
Abstract: A method includes obtaining a base structure of a tandem solar cell device and forming a transparent conductive oxide (TCO) layer on the base structure using a low damage sputter deposition (LDSD) process. The LDSD process includes a rotary facing sputter deposition process.
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公开(公告)号:US20240381675A1
公开(公告)日:2024-11-14
申请号:US18649730
申请日:2024-04-29
Applicant: Applied Materials, Inc.
Inventor: Yongkee Chae , Yong Jin Kim , Cheng-Pei Ouyang , Su-Ho Cho
Abstract: A method includes obtaining a set of tandem solar cell devices, and forming, on each tandem solar cell device of the set of tandem solar cell devices using a deposition process, a discrete encapsulation layer along an upper surface and side surfaces of the tandem solar cell device.
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