公开(公告)号：US11784032B2

公开(公告)日：2023-10-10

申请号：US17285074

申请日：2018-11-14

Applicant: Applied Materials, Inc.

Inventor： Lizhong Sun ,  Xiaodong Yang ,  Yufei Zhou ,  Yi Yang

IPC: H01J37/34 ,  C23C14/35

CPC classification number: H01J37/3455 ,  C23C14/35 ,  H01J37/3408 ,  H01J2237/332

Abstract: A chamber includes a target (16) and a magnetron (50) disposed over the target (16). The magnetron (50) includes a plurality of magnets (52, 54). The magnetron (50) has a longitudinal dimension and a lateral dimension. The longitudinal dimension of the magnetron (50) is tilted with respect to the target (16) so the distances between magnets (52, 54) and the target (16) vary. As the magnetron (50) rotates during operation, the strength of the magnetic field produced by the magnetron (50) is an average of the various strengths of magnetic fields produced by the magnets (52, 54). The averaging of the strengths of the magnetic fields leads to uniform film properties and uniform target erosion.