DETECTING TARGETED LOCATIONS IN A SEMICONDUCTOR SPECIMEN

    公开(公告)号:US20210042905A1

    公开(公告)日:2021-02-11

    申请号:US16533737

    申请日:2019-08-06

    Abstract: A method and system for detecting defects in a specimen, the method comprising: obtaining an image comprising a plurality of pixels of a specimen part; processing the image according to a detection recipe to derive information related to potential defects in the specimen, said information comprising a first data set informative of first locations identified, in accordance with the detection recipe as locations of potential defects, and a second data set informative of second locations not identified as locations of potential defects; receiving data specifying targeted locations of interest within the part of the specimen; when the first data set is not informative of each targeted location, generating a third data set by adding to the first data set information related to the missing targeted location from the second data set, the information bearing an indication that it corresponds to a targeted location; and outputting the third data set.

    MACHINE LEARNING BASED DEFECT EXAMINATION AND RANKING FOR SEMICONDUCTOR SPECIMENS

    公开(公告)号:US20250124307A1

    公开(公告)日:2025-04-17

    申请号:US18488888

    申请日:2023-10-17

    Abstract: There is provided a system and method of defect examination on a semiconductor specimen. The method comprises: obtaining an inspection dataset informative of a group of defect candidates and attributes thereof resulting from examining the specimen by an inspection tool; classifying, by a classifier, the group of defect candidates into a plurality of defect classes such that each defect candidate is associated with a respective defect class; and ranking, by a decision model, the group of defect candidates into a total order using a sorting rule. Each defect candidate is associated with a distinct ranking in the total order representative of the likelihood of the defect candidate being a defect of interest (DOI). The decision model is previously trained to learn the sorting rule pertaining to the plurality of defect classes associated with the group of defect candidates and a series of attributes in the inspection data.

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