公开(公告)号：US20230069303A1

公开(公告)日：2023-03-02

申请号：US17465753

申请日：2021-09-02

Applicant: Applied Materials Israel Ltd.

Inventor： Roman KRIS ,  Ilan BEN-HARUSH ,  Rafael BISTRITZER ,  Vadim VERESCHAGIN ,  Elad SOMMER ,  Grigory KLEBANOV ,  Arundeepth THAMARASSERY ,  Jannelle Anna GEVA ,  Gal Daniel GUTTERMAN ,  Einat FRISHMAN ,  Sahar LEVIN

IPC: G01B9/02 ,  G01B11/24 ,  G06T7/00

Abstract: There is provided a system and method of a method of detecting a local shape deviation of a structural element in a semiconductor specimen, comprising: obtaining an image comprising an image representation of the structural element; extracting, from the image, an actual contour of the image representation; estimating a reference contour of the image representation indicative of a standard shape of the structural element, wherein the reference contour is estimated based on a Fourier descriptor representative of the reference contour, the Fourier descriptor being estimated using an optimization method based on a loss function specifically selected to be insensitive to local shape deviation of the actual contour; and performing one or more measurements representative of one or more differences between the actual contour and the reference contour, the measurements indicative of whether a local shape deviation is present in the structural element.

公开(公告)号：US20220301196A1

公开(公告)日：2022-09-22

申请号：US17209086

申请日：2021-03-22

Applicant: Applied Materials Israel Ltd.

Inventor： David ULIEL ,  Yan AVNIEL ,  Bobin Mathew SKARIA ,  Oz FOX-KAHANA ,  Gal Daniel GUTTERMAN ,  Atai BALDINGER ,  Murad MUSLIMANY ,  Erez LIDOR

IPC: G06T7/30 ,  G06T5/50 ,  G06T7/00 ,  G06K9/62 ,  H01J37/26

Abstract: There is provided a system and method of examination of a semiconductor specimen, comprising: obtaining a sequence of frames of an area of the specimen acquired by an electron beam tool configured to scan the area from a plurality of directions, the sequence comprising a plurality of sets of frames each acquired from a respective direction; and registering the plurality of sets of frames and generating an image of the specimen based on result of the registration, comprising: performing, for each direction, a first registration among the set of frames acquired therefrom, and combining the registered set of frames to generate a first composite frame, giving rise to a plurality of first composite frames respectively corresponding to the plurality of directions; and performing a second registration among the plurality of first composite frames, and combining the registered plurality of first composite frames to generate the image of the specimen.