公开(公告)号：US11526979B2

公开(公告)日：2022-12-13

申请号：US16993869

申请日：2020-08-14

Applicant: Applied Materials Israel, Ltd.

Inventor： Assaf Asbag ,  Orly Zvitia ,  Idan Kaizerman ,  Efrat Rosenman

IPC: G06T7/00 ,  G06K9/62

Abstract: There are provided system and method of classifying defects in a specimen. The method includes: obtaining one or more defect clusters detected on a defect map of the specimen, each cluster characterized by a set of cluster attributes comprising spatial attributes including spatial density indicative of density of defects in one or more regions accommodating the cluster, each given defect cluster being detected at least based on the spatial density thereof meeting a criterion. The defect map also comprises non-clustered defects. Defects of interest (DOI) are identified in each cluster by performing respective defect filtrations for each cluster and non-clustered defects.

公开(公告)号：US10748271B2

公开(公告)日：2020-08-18

申请号：US15962909

申请日：2018-04-25

Applicant: Applied Materials Israel, Ltd.

Inventor： Assaf Asbag ,  Orly Zvitia ,  Idan Kaizerman ,  Efrat Rosenman

IPC: G06K9/00 ,  G06K9/62 ,  G01B5/28 ,  G01N21/00 ,  G06T7/00

Abstract: There are provided system and method of classifying defects in a specimen. The method includes: obtaining one or more defect clusters detected on a defect map of the specimen, each cluster characterized by a set of cluster attributes comprising spatial attributes including spatial density indicative of density of defects in one or more regions accommodating the cluster, each given defect cluster being detected at least based on the spatial density thereof meeting a criterion; for each cluster, applying a cluster classifier to a respective set of cluster attributes thereof to associate the cluster with one or more labels of a predefined set of labels, wherein the cluster classifier is trained using cluster training data; and identifying DOI in each cluster by performing a defect filtration for each cluster using one or more filtering parameters specified in accordance with the label of the cluster.

公开(公告)号：US09715724B2

公开(公告)日：2017-07-25

申请号：US14446295

申请日：2014-07-29

Applicant: Applied Materials Israel Ltd.

Inventor： Ishai Schwarzband ,  Yan Ivanchenko ,  Daniel Ravid ,  Orly Zvitia ,  Idan Kaizerman

IPC: G06K9/00 ,  G06T7/00 ,  G06K9/62

CPC classification number: G06T7/001 ,  G06K9/4604 ,  G06K9/6211 ,  G06K2209/19 ,  G06K2209/403 ,  G06T2207/10028 ,  G06T2207/10061 ,  G06T2207/30148

Abstract: A method for image processing includes providing a microscopic image of a structure fabricated on a substrate and computer-aided design (CAD) data used in fabricating the structure. The microscopic image is processed by a computer so as to generate a first directionality map, which includes, for a matrix of points in the microscopic image, respective directionality vectors corresponding to magnitudes and directions of edges at the points irrespective of a sign of the magnitudes. The CAD data are processed by the computer so as to produce a simulated image based on the CAD data and to generate a second directionality map based on the simulated image. The first and second directionality maps are compared by the computer so as to register the microscopic image with the CAD data.