公开(公告)号：US20160290786A1

公开(公告)日：2016-10-06

申请号：US14676571

申请日：2015-04-01

Applicant: APPLIED MATERIALS ISRAEL LTD.

Inventor： Yuval GRONAU ,  Chun-Hsiang YEN ,  Barak DEE-NOOR

IPC: G01B11/00 ,  H01L21/67 ,  H01L21/687 ,  F16M11/42

CPC classification number: G01B11/002 ,  F16M11/42 ,  H01L21/67248 ,  H01L21/68764

Abstract: A system that may include a movable support module for supporting an object and a controller, wherein the controller is configured to: receive an estimated location of a movable support module that supports an object and temperature information about an actual or estimated temperature of at least a portion of the object support module; and calculate movable support module location information, in response to (a) the estimated location of the movable support module, (b) the temperature information, and (c) a mapping between (i) values of the temperature information, (ii) estimated locations of the movable support module, and (iii) location errors of the movable support module

Abstract translation: 一种可以包括用于支撑物体和控制器的可移动支撑模块的系统，其中所述控制器被配置为：接收支撑物体的可移动支撑模块的估计位置和关于至少一个 对象支持模块的一部分; 并响应于（a）可移动支撑模块的估计位置，（b）温度信息，和（c）（i）温度信息值之间的映射，（ii）估计的可移动支撑模块位置信息 可移动支撑模块的位置，和（iii）可移动支撑模块的位置误差

公开(公告)号：US20170011881A1

公开(公告)日：2017-01-12

申请号：US14795877

申请日：2015-07-09

Applicant: Applied Materials Israel Ltd.

Inventor： Yuval GRONAU ,  Ishai SCHWARZBAND ,  Barak DEE-NOOR

IPC: H01J37/22 ,  H01J37/26 ,  H04N7/18

CPC classification number: H01J37/28 ,  G06T5/002 ,  G06T7/00 ,  G06T2207/10061 ,  H01J2237/221 ,  H01J2237/281

Abstract: A system that may include a processor, wherein the processor comprise an image waveform finder, a synthetic image generator and an output image generator; wherein the processor is configured to (i) receive or generate multiple images of a region of the object; wherein the region has an electron yield that is below an electron yield threshold; wherein each image is generated by scanning the region with an electron beam; (ii) process the multiple images to generate multiple synthetic images, and (iii) generate an output image of the region in response to the multiple synthetic images; wherein the image waveform finder is configured to process each image of the multiple images to find at least one image waveform that has a peak intensity that exceeds an intensity threshold; wherein the synthetic image generator is configured to replace one or more of the at least one image waveforms by one or more corresponding synthetic waveforms to provide a synthetic image; and wherein the output image generator is configured to generate an output image of the region in response to the multiple synthetic images

Abstract translation: 一种可包括处理器的系统，其中所述处理器包括图像波形取景器，合成图像发生器和输出图像发生器; 其中所述处理器被配置为（i）接收或生成所述对象的区域的多个图像; 其中所述区域具有低于电子产生阈值的电子产率; 其中通过用电子束扫描所述区域来产生每个图像; （ii）处理所述多个图像以生成多个合成图像，以及（iii）响应于所述多个合成图像生成所述区域的输出图像; 其中所述图像波形取景器被配置为处理所述多个图像的每个图像以找到具有超过强度阈值的峰值强度的至少一个图像波形; 其中所述合成图像产生器被配置为通过一个或多个相应的合成波形来替换所述至少一个图像波形中的一个或多个以提供合成图像; 并且其中所述输出图像生成器被配置为响应于所述多个合成图像来生成所述区域的输出图像