公开(公告)号：US20120308346A1

公开(公告)日：2012-12-06

申请号：US13488433

申请日：2012-06-04

申请人： Arthur KEIGLER ,  Freeman Fisher ,  Mehran Asdigha

发明人： Arthur KEIGLER ,  Freeman Fisher ,  Mehran Asdigha

IPC分类号： H01L21/677

CPC分类号： H01L21/67757 ,  H01L21/67028 ,  H01L21/67034 ,  H01L21/67051 ,  H01L21/67057 ,  H01L21/67173 ,  H01L21/6776 ,  H01L21/67781 ,  H01L21/68 ,  H01L21/68707

摘要： A substrate unload and load apparatus adapted to unload and load a plurality of processed substrates from a plurality of arrayed substrate holders, the apparatus having a frame and a plurality of processed substrate supports coupled to the frame configured to support the processed substrates. A plurality of unprocessed substrate supports is coupled to the frame configured to support the unprocessed substrates, each of the unprocessed substrate supports alternating and interleaved with each of the processed substrate supports. A holder release is coupled to the frame and configured to engage the arrayed substrate holders having a first state where the arrayed substrate holders releases the processed substrates from the arrayed substrate holders, the holder release having a second state where the arrayed substrate holders captures the unprocessed substrates with arrayed substrate holders.

摘要翻译： 一种衬底卸载和负载装置，适于从多个排列的衬底保持器卸载和加载多个经处理的衬底，所述装置具有框架和多个经处理的衬底支撑件，所述衬底支撑件被配置成支撑经处理的衬底。 多个未处理的衬底支撑件被耦合到框架，该框架被配置为支撑未处理的衬底，每个未处理的衬底支撑件与每个处理的衬底支撑件交替并交错。 保持器释放件联接到框架并且被配置为接合具有第一状态的排列的衬底保持器，其中阵列的衬底保持器从排列的衬底保持器释放经处理的衬底，保持器释放具有第二状态，其中阵列衬底保持器捕获未处理 具有阵列基板支架的基板。