公开(公告)号：US11313796B2

公开(公告)日：2022-04-26

申请号：US16480374

申请日：2018-02-19

Applicant: Asahi Kasei Microdevices Corporation

Inventor： Toshiro Sakamoto ,  Tatsushi Yagi

IPC: G01N21/35 ,  G01N21/552 ,  G01N21/3504 ,  G01N21/3577 ,  G02B6/42

Abstract: An optical waveguide (10) includes a substrate (15), a core layer (11) that extends along the longitudinal direction and through which infrared light IR can propagate, and a support (17) formed from a material with a smaller refractive index than the core layer (11) and configured to connect at least a portion of the substrate (15) and at least a portion of the core layer (11) to support the core layer with respect to the substrate (15). A connecting portion (171) of the support (17) connected to the core layer (11) is shifted from the position having the shortest distance from the center to the outer surface in a cross-section perpendicular to the longitudinal direction of the core layer (11).

公开(公告)号：US11313797B2

公开(公告)日：2022-04-26

申请号：US17144139

申请日：2021-01-08

Applicant: Asahi Kasei Microdevices Corporation

Inventor： Tatsushi Yagi ,  Takaaki Furuya ,  Toshiro Sakamoto

IPC: G01N21/552 ,  G02B6/42 ,  G01N21/3504

Abstract: Sticking of core layer is suppressed, and deterioration of sensitivity of a sensor is prevented. An optical waveguide (10) includes a substrate (15), a core layer (11), a support, and a protrusion (18). The core layer (11) can transmit light. The support connects at least a portion of the substrate (15) and a portion of the core layer (11) together. The support supports the core layer (11). The protrusion (18) is arranged at a position different from a position of the support in a space between the substrate (15) and the core layer (11). The protrusion (18) has a maximum height at a position deviated from a central position cp of the core layer (11) in a width direction. The protrusion (18) protrudes toward the core layer (11) from the substrate (15).

公开(公告)号：US10438951B2

公开(公告)日：2019-10-08

申请号：US15921056

申请日：2018-03-14

Applicant: ASAHI KASEI MICRODEVICES CORPORATION

Inventor： Shuntaro Fujii ,  Tatsushi Yagi ,  Shohei Hamada

IPC: H01L27/092 ,  H01L21/8234 ,  H01L27/088 ,  H01L21/266 ,  H01L29/06 ,  H01L21/8238

Abstract: An object of the present invention is to provide a semiconductor device and a manufacturing method thereof that may achieve low power consumption in a digital circuit and reduce influence of noise in an analog circuit. The manufacturing method of the semiconductor device includes a first source/drain forming step of forming a first source region and a first drain region by implanting impurities of a second conductivity type into a digital side second conductivity type impurity layer using a gate electrode and a sidewall as a mask and a second drain/source forming step of forming a second source region and a second drain region by implanting impurities of the second conductivity type into an analog side second conductivity type impurity layer using a gate electrode and a sidewall as a mask more shallowly than the impurities of the second conductivity type implanted in the first source/drain forming step.

公开(公告)号：US11209361B2

公开(公告)日：2021-12-28

申请号：US16823331

申请日：2020-03-19

Applicant: Asahi Kasei Microdevices Corporation

Inventor： Toshiro Sakamoto ,  Tatsushi Yagi

IPC: G01N21/59 ,  G01N21/3504 ,  G02B6/293

Abstract: An optical density measuring apparatus and an optical waveguide capable of increasing the degree of design freedom are provided. The optical density measuring apparatus is for measuring density of a gas or a liquid to be measured and includes a light source capable of irradiating light into a core layer, a detector capable of receiving light propagated through the core layer, and an optical waveguide. The optical waveguide includes a substrate and the core layer, which includes a diffraction grating unit and a light propagation unit capable of propagating light in an extending direction of the light propagation unit. The diffraction grating unit and a portion of the core layer are separated in the thickness direction of the optical waveguide.

公开(公告)号：US11892438B2

公开(公告)日：2024-02-06

申请号：US17115792

申请日：2020-12-09

Applicant: Asahi Kasei Microdevices Corporation

Inventor： Takaaki Furuya ,  Tatsushi Yagi ,  Toshiro Sakamoto

IPC: G01N33/00 ,  G01N21/552 ,  G02B6/42 ,  G01N21/59 ,  G02B6/122 ,  G02B6/12 ,  G02B6/124

CPC classification number: G01N33/0027 ,  G01N21/552 ,  G01N21/5907 ,  G02B6/122 ,  G02B6/12002 ,  G02B6/124 ,  G02B6/4215 ,  G01N2201/0635 ,  G01N2201/08

Abstract: Provided is an optical densitometer for measuring a density of a gas or liquid of interest, the optical densitometer comprising: a light source capable of introducing light into a core layer; a detector capable of receiving the light that has propagated through the core layer; and an optical waveguide, the optical waveguide comprising: a substrate; and the core layer comprising a light propagation portion capable of propagating the light in an extending direction of the light propagation portion, and a diffraction grating portion, the diffraction grating portion comprising a diffraction grating region and an extension region connected to the diffraction grating region, and a first optical coupling region included in the extension region and a second optical coupling region included in the light propagation portion being optically coupled with respect to the light propagating through the core layer.

公开(公告)号：US11686679B2

公开(公告)日：2023-06-27

申请号：US17651811

申请日：2022-02-21

Applicant: Asahi Kasei Microdevices Corporation

Inventor： Toshiro Sakamoto ,  Tatsushi Yagi

IPC: G01N21/64 ,  G01N21/552 ,  G01N21/3504 ,  G01N21/3577 ,  G02B6/42

CPC classification number: G01N21/552 ,  G01N21/3504 ,  G01N21/3577 ,  G02B6/4215

Abstract: An optical waveguide includes a core layer which extends along a longitudinal direction and through which light can propagate; and a protective film that is formed on at least a portion of a surface of the core layer and has a smaller refractive index than the core layer. At least a portion of the protective film is provided in a manner allowing contact with a gas or a liquid. In a cross-section of at least a portion perpendicular to a longitudinal direction of the core layer, the protective film is formed around the entire surface of the core layer.

公开(公告)号：US10928318B2

公开(公告)日：2021-02-23

申请号：US16556539

申请日：2019-08-30

Applicant: Asahi Kasei Microdevices Corporation

Inventor： Tatsushi Yagi ,  Takaaki Furuya ,  Toshiro Sakamoto

IPC: G01N21/552 ,  G02B6/42 ,  G01N21/3504

Abstract: Sticking of core layer is suppressed, and deterioration of sensitivity of a sensor is prevented. An optical waveguide (10) includes a substrate (15), a core layer (11), a support, and a protrusion (18). The core layer (11) can transmit light. The support connects at least a portion of the substrate (15) and a portion of the core layer (11) together. The support supports the core layer (11). The protrusion (18) is arranged at a position different from a position of the support in a space between the substrate (15) and the core layer (11). The protrusion (18) has a maximum height at a position deviated from a central position cp of the core layer (11) in a width direction. The protrusion (18) protrudes toward the core layer (11) from the substrate (15).