公开(公告)号：US11340248B2

公开(公告)日：2022-05-24

申请号：US16511433

申请日：2019-07-15

Applicant: Atlantic Inertial Systems Limited

Inventor： Alan Malvern ,  Kiran Harish

IPC: G01P1/02 ,  G01P1/00

Abstract: A sensor package comprising: a sensor, wherein the sensor comprises a sensing structure formed in a material layer and one or more further material layers arranged to seal the sensing structure to form a hermetically sealed sensor unit; a support structure; one or more springs flexibly fixing the hermetically sealed sensor unit to the support structure; wherein the one or more springs are formed in the same material layer as the sensing structure of the sensor unit; and one or more external package wall(s) encapsulating the sensor unit, the support structure, and the one or more springs, wherein the support structure is fixed to at least one of the package wall(s). The springs decouple mechanical stresses between the sensor unit and the external package wall(s) so as to reduce the long term drift of scale factor and bias.

公开(公告)号：US10422811B2

公开(公告)日：2019-09-24

申请号：US15118995

申请日：2015-02-16

Applicant: Atlantic Inertial Systems Limited

Inventor： Alan Richard Malvern ,  Kiran Harish

IPC: G01P15/125 ,  G01P15/08

Abstract: A sensing structure for an accelerometer includes a support and a proof mass mounted to the support by flexible legs for in-plane movement in response to an applied acceleration along a sensing direction. The proof mass includes a plurality of moveable electrode fingers extending substantially perpendicular to the sensing direction and spaced apart in the sensing direction. The structure also includes at least one pair of fixed capacitor electrodes comprising first and second sets of fixed electrode fingers extending substantially perpendicular to the sensing direction and spaced apart in the sensing direction; the first set of fixed electrode fingers arranged to interdigitate with the moveable electrode fingers with a first offset in one direction from a median line therebetween, and the second set of fixed electrode fingers arranged to interdigitate with the moveable electrode fingers with a second offset in the opposite direction from a median line therebetween.

公开(公告)号：US20160252544A1

公开(公告)日：2016-09-01

申请号：US15027277

申请日：2014-09-22

Applicant: ATLANTIC INERTIAL SYSTEMS LIMITED

Inventor： Alan Richard Malvern ,  Kiran Harish

IPC: G01P15/125

CPC classification number: G01P15/125 ,  G01P15/13 ,  G01P15/131 ,  G01P2015/0814

Abstract: A closed loop method of controlling a capacitive accelerometer uses two servo loops. A Vcrit servo loop uses an output signal (S2) modulated by a sine wave signal (S1). The Vcrit control signal adjusts the magnitude of the PWM drive signals applied to the fixed capacitor electrodes of the accelerometer, thereby optimising open loop gain.

Abstract translation: 控制电容加速度计的闭环方法使用两个伺服回路。 Vcrit伺服环路使用由正弦波信号（S1）调制的输出信号（S2）。 Vcrit控制信号调整施加到加速度计的固定电容器电极的PWM驱动信号的大小，从而优化开环增益。

公开(公告)号：US10241128B2

公开(公告)日：2019-03-26

申请号：US15027277

申请日：2014-09-22

Applicant: Atlantic Inertial Systems Limited

Inventor： Alan Richard Malvern ,  Kiran Harish

IPC: G01P15/125 ,  G01P15/13 ,  G01P15/08

Abstract: A closed loop method of controlling a capacitive accelerometer uses two servo loops. A Vcrit servo loop uses an output signal (S2) modulated by a sine wave signal (S1). The Vcrit control signal adjusts the magnitude of the PWM drive signals applied to the fixed capacitor electrodes of the accelerometer, thereby optimising open loop gain.

公开(公告)号：US20160356806A1

公开(公告)日：2016-12-08

申请号：US15118995

申请日：2015-02-16

Applicant: ATLANTIC INERTIAL SYSTEMS LIMITED

Inventor： Alan Richard Malvern ,  Kiran Harish

IPC: G01P15/125

Abstract: A sensing structure for an accelerometer includes a support and a proof mass mounted to the support by flexible legs for in-plane movement in response to an applied acceleration along a sensing direction. The proof mass includes a plurality of moveable electrode fingers extending substantially perpendicular to the sensing direction and spaced apart in the sensing direction. The structure also includes at least one pair of fixed capacitor electrodes comprising first and second sets of fixed electrode fingers extending substantially perpendicular to the sensing direction and spaced apart in the sensing direction; the first set of fixed electrode fingers arranged to interdigitate with the moveable electrode fingers with a first offset in one direction from a median line therebetween, and the second set of fixed electrode fingers arranged to interdigitate with the moveable electrode fingers with a second offset in the opposite direction from a median line therebetween.

Abstract translation: 用于加速度计的感测结构包括支撑件和用于响应于沿着感测方向的施加的加速度而通过柔性腿安装到支撑件的用于面内运动的检测质量。 检测质量包括基本上垂直于感测方向延伸并沿感测方向间隔开的多个可移动电极指。 该结构还包括至少一对固定电容器电极，其包括基本上垂直于感测方向延伸并沿感测方向间隔开的第一组和第二组固定电极指; 所述第一固定电极指组被布置成与所述可移动电极指与所述可移动电极指与其中间线在一个方向上的第一偏移相互指向，并且所述第二组固定电极指被布置成与所述可移动电极指相互指向， 与它们之间的中线相反。