摘要:
A covered acceleration sensor element includes a weight portion, a support frame portion surrounding the weight portion, a plurality of flexible beam portions for connecting the weight portion to the support frame portion to support the weight portion, piezoresistance elements provided on the beam portions, and wirings for connecting them. An upper cover and a lower cover enclosing the periphery of the weight portion together with the support frame portion are joined to the face and back of the support frame portion. Acceleration in the directions of three axes, i.e., a first axis in the joining thickness direction, a second axis in a plane perpendicular to the first axis, and a third axis in the plane and perpendicular to the second axis, or acceleration in the direction of any of the axes, is detected from changes in the resistances of the piezoresistance elements. The support frame portion is separated by separation grooves into an inner frame and an outer frame. The upper cover and the lower cover are joined to the outer frame. The inner frame is connected to the outer frame by a plurality of inner frame support portions having flexibility. The beam portions are connected to both sides of the weight portion along the second axis and the third axis. The inner frame support portions are connected to both sides of the inner frame in a direction in which they are rotated nearly 45 degrees from the second axis and the third axis.
摘要:
Disclosed is a multi-range three-axis acceleration sensor device in which a plurality of three-axis acceleration sensor elements are formed without axial deviation among them in a single silicon chip and have different acceleration measurement ranges. Each of the plurality of sensor elements includes a weight, a frame surrounding the weight and flexible members composed of beams or diaphragm connecting the weight with the frame. Each of the plurality of sensor elements causes different output voltage for unit acceleration from another. A first three-axis acceleration sensor element among the plurality of sensor elements has other sensor elements of them formed in a frame of the first one and causes a larger output voltage for unit acceleration than the others.
摘要:
In the object lens drive unit including a lens holder with an object lens attached to, a plurality of driving coils attached to the lens holder, connection substrates attached to both sides of the lens holder, and a plurality of suspension wires with end parts thereof connected to the connection substrates for operatively supporting the lens holder, a plurality of sets of wire connection electrodes for connecting the suspension wires and coil connection electrodes electrically connected to the wire connection electrodes for connecting terminal wires of the coils are arranged in line in an optic axis direction of the object lens and the wire connection electrodes and the coil connection electrodes are formed in a symmetric shape to a central axis parallel to the optic axis direction on the connection substrates.
摘要:
In a laser source module aligning laser beams from laser sources for three colors, red, green, and blue on a single combined beam optical axis, decreasing relative displacements of beam spots of three colors, occurring due to thermal deformation by temperature rise, is achieved by a laser source module including plural laser sources, each incorporating a laser having a laser chip installed on a heat sink and a lens converting a light radiated from the laser into a laser beam, and a beam combining unit aligning the laser beams from the laser sources on a single combined beam optical axis, wherein the lasers in at least two or more ones of the laser sources are arranged so that their laser beams will be decentered toward a same direction on the combined beam optical axis upon displacement of an emission point of the laser chip away from the heat sink.