公开(公告)号：US20170178933A1

公开(公告)日：2017-06-22

申请号：US15391086

申请日：2016-12-27

Applicant: Axcelis Technologies, Inc.

Inventor： Joseph Ferrara ,  Robert J. Mitchell

IPC: H01L21/67 ,  C23C14/48 ,  H01L21/677

CPC classification number: H01L21/67213 ,  C23C14/48 ,  H01L21/67201 ,  H01L21/67265 ,  H01L21/67745

Abstract: An ion implantation apparatus, system, and method are provided for transferring a plurality of workpieces between vacuum and atmospheric pressures, wherein an alignment mechanism is operable to align a plurality of workpieces for generally simultaneous transportation to a dual-workpiece load lock chamber. The alignment mechanism comprises a characterization device, an elevator, and two vertically-aligned workpiece supports for supporting two workpieces. First and second atmospheric robots are configured to generally simultaneously transfer two workpieces at a time between load lock modules, the alignment mechanism, and a FOUP. Third and fourth vacuum robots are configured to transfer one workpiece at a time between the load lock modules and a process module.

公开(公告)号：US10832926B2

公开(公告)日：2020-11-10

申请号：US15391086

申请日：2016-12-27

Applicant: Axcelis Technologies, Inc.

Inventor： Joseph Ferrara ,  Robert J. Mitchell

IPC: H01L21/67 ,  H01L21/677 ,  C23C14/48

Abstract: An ion implantation apparatus, system, and method are provided for transferring a plurality of workpieces between vacuum and atmospheric pressures, wherein an alignment mechanism is operable to align a plurality of workpieces for generally simultaneous transportation to a dual-workpiece load lock chamber. The alignment mechanism comprises a characterization device, an elevator, and two vertically-aligned workpiece supports for supporting two workpieces. First and second atmospheric robots are configured to generally simultaneously transfer two workpieces at a time between load lock modules, the alignment mechanism, and a FOUP. Third and fourth vacuum robots are configured to transfer one workpiece at a time between the load lock modules and a process module.