公开(公告)号：US20100188666A1

公开(公告)日：2010-07-29

申请号：US11813334

申请日：2006-01-05

申请人： Matthias Brunner ,  Ralf Schmid ,  Bernhard Mueller ,  Axel Wenzel

发明人： Matthias Brunner ,  Ralf Schmid ,  Bernhard Mueller ,  Axel Wenzel

IPC分类号： G01B11/14

CPC分类号： G09G3/006 ,  G01R31/305 ,  G01R31/308 ,  G01R35/005 ,  H01J2237/2826

摘要： The invention relates to a method of calibration of the beam position of a corpuscular beam. A calibration body with structures is used, wherein the structures have a structure period Ps in the plain section and within each structure there is a position L intended for the measurement. For the calibration, at least one detection signal each at structures in the plain section of the calibration body is generated, wherein the corpuscular beam is deflected with deflectors on beam target positions L1 with the beam target period P1, which is larger than half of the structure period Ps, whereby a basic calibration is used for the control of the deflectors, and wherein the beam target deflections intentionally deviate either in the beam target period P1 from the structure period Ps and/or in the beam target position L1 from the position L.

摘要翻译： 本发明涉及一种校准红细胞束的束位置的方法。 使用具有结构的校准体，其中结构在平坦部分中具有结构周期Ps，并且在每个结构内具有用于测量的位置L. 对于校准，生成校准体的平坦部分中的结构处的至少一个检测信号，其中，粒子束在束目标位置L1上被偏转器偏转，其中光束目标周期P1大于 结构周期Ps，由此基准校准用于偏转器的控制，并且其中光束目标偏转有意地在光束目标周期P1中与结构周期Ps和/或光束目标位置L1从位置L 。

公开(公告)号：US20060028230A1

公开(公告)日：2006-02-09

申请号：US10977510

申请日：2004-10-29

申请人： Axel Wenzel ,  Ralf Schmid ,  Matthias Brunner

发明人： Axel Wenzel ,  Ralf Schmid ,  Matthias Brunner

IPC分类号： G01R31/00

CPC分类号： G01N23/2251 ,  G02F2001/136254

摘要： The present invention provides a method of electron beam testing of liquid crystal displays comprising non-uniform electrodes having a conductive portion and a dielectric portion. In accordance with methods of the present invention, the diameter of the electron beam is increased so that the beam is less focused, i.e., enlarged or “blurred,” over a non-uniform electrode area. The diameter of the beam is increased so that the beam generates secondary electrons from the conductive portion of the non-uniform electrode area. The configured test beam may be circular, elliptical, or other suitable shapes.

摘要翻译： 本发明提供了包括具有导电部分和电介质部分的不均匀电极的液晶显示器的电子束测试方法。 根据本发明的方法，电子束的直径增加，使得光束在非均匀电极区域上聚焦较少，即扩大或“模糊”。 光束的直径增加，使得光束从非均匀电极区域的导电部分产生二次电子。 配置的测试光束可以是圆形，椭圆形或其他合适的形状。

公开(公告)号：US08009299B2

公开(公告)日：2011-08-30

申请号：US11813334

申请日：2006-01-05

申请人： Matthias Brunner ,  Ralf Schmid ,  Bernhard Mueller ,  Axel Wenzel

发明人： Matthias Brunner ,  Ralf Schmid ,  Bernhard Mueller ,  Axel Wenzel

IPC分类号： G01B11/14

CPC分类号： G09G3/006 ,  G01R31/305 ,  G01R31/308 ,  G01R35/005 ,  H01J2237/2826

摘要： The invention relates to a method of calibration of the beam position of a corpuscular beam. A calibration body with structures is used, wherein the structures have a structure period PS in the plain section and within each structure there is a position L intended for the measurement. For the calibration, at least one detection signal each at structures in the plain section of the calibration body is generated, wherein the corpuscular beam is deflected with deflectors on beam target positions L1 with the beam target period P1, which is larger than half of the structure period PS, whereby a basic calibration is used for the control of the deflectors, and wherein the beam target deflections deviate either in the beam target period P1 from the structure period PS and/or in the beam target position L1 from the position L.

摘要翻译： 本发明涉及一种校准红细胞束的束位置的方法。 使用具有结构的校准体，其中结构在平坦部分中具有结构周期PS，并且在每个结构内具有用于测量的位置L. 对于校准，生成校准体的平坦部分中的结构处的至少一个检测信号，其中，粒子束在束目标位置L1上被偏转器偏转，其中光束目标周期P1大于 结构周期PS，由此使用基准校准来控制偏转器，并且其中光束目标偏转在光束目标周期P1中与结构周期PS和/或从位置L的光束目标位置L1偏离。

公开(公告)号：US07256606B2

公开(公告)日：2007-08-14

申请号：US10977510

申请日：2004-10-29

申请人： Axel Wenzel ,  Ralf Schmid ,  Matthias Brunner

发明人： Axel Wenzel ,  Ralf Schmid ,  Matthias Brunner

IPC分类号： G01R31/00 ,  G01R31/307

CPC分类号： G01N23/2251 ,  G02F2001/136254

摘要： The present invention provides a method of electron beam testing of liquid crystal displays comprising non-uniform electrodes having a conductive portion and a dielectric portion. In accordance with methods of the present invention, the diameter of the electron beam is increased so that the beam is less focused, i.e., enlarged or “blurred,” over a non-uniform electrode area. The diameter of the beam is increased so that the beam generates secondary electrons from the conductive portion of the non-uniform electrode area. The configured test beam may be circular, elliptical, or other suitable shapes.

摘要翻译： 本发明提供了包括具有导电部分和电介质部分的不均匀电极的液晶显示器的电子束测试方法。 根据本发明的方法，电子束的直径增加，使得光束在非均匀电极区域上聚焦较少，即扩大或“模糊”。 光束的直径增加，使得光束从非均匀电极区域的导电部分产生二次电子。 配置的测试光束可以是圆形，椭圆形或其他合适的形状。