公开(公告)号：US20200173029A1

公开(公告)日：2020-06-04

申请号：US16742085

申请日：2020-01-14

Applicant: BASF SE

Inventor： Cornelia ROEGER-GOEPFERT ,  Roman Benedikt RAETHER ,  Charlotte EMNET ,  Alexandra HAAG ,  Dieter MAYER

IPC: C23C18/31 ,  C25D3/38 ,  H01L21/288 ,  C23C18/32 ,  C25D3/58 ,  H01L21/768

Abstract: Composition comprising a source of metal ions and at least one suppressing agent obtainable by reacting a) an amine compound comprising at least three active amino functional groups with b) a mixture of ethylene oxide and at least one compound selected from C3 and C4 alkylene oxides.

公开(公告)号：US20190309429A1

公开(公告)日：2019-10-10

申请号：US16468467

申请日：2017-12-19

Applicant: BASF SE

Inventor： Marcel Patrik KIENLE ,  Dieter MAYER ,  Marco ARNOLD ,  Alexandra HAAG ,  Charlotte EMNET ,  Alexander FLUEGEL

IPC: C25D3/32 ,  C25D3/38 ,  C25D7/12 ,  H01L21/288

Abstract: The invention relates to a polyamine-based or polyhydric alcohol-based suppressing agent. The suppressing agent is modified by reaction with a compound that introduces a branching group into the suppressing agent before they are reacted with an alkylene oxide. The suppressing agent shows extraordinary superfilling properties, particularly when used to fill in features having extremely small aperture sizes and/or high aspect ratios.