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公开(公告)号：US11180719B2
公开(公告)日：2021-11-23
申请号：US16756303
申请日：2018-10-29
申请人： BASF SE
发明人： Daniel Loeffler , Mei Chin Shen , Sheng Hsuan Wei , Frank Pirrung , Lothar Engelbrecht , Yeni Burk , Andreas Klipp , Marcel Brill , Szilard Csihony
摘要： The invention relates to the use of a non-aqueous composition comprising an organic solvent and at least one particular siloxane-type additive for treating substrates comprising patterns having line-space dimensions of 50 nm or below and aspect ratios of 4 or more as well as a method for manufacturing integrated circuit devices, optical devices, micromachines and mechanical precision devices, the said method comprising the steps of (1) providing a substrate having patterned material layers having line-space dimensions of 50 nm, aspect ratios of greater or equal 4, or a combination thereof, (2) contacting the substrate at least once with a non-aqueous composition, and (3) removing the non-aqueous composition from the contact with the substrate, wherein the non-aqueous composition comprising an organic solvent and at least one of such siloxane-type additives.
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公开(公告)号：US20220169956A1
公开(公告)日：2022-06-02
申请号：US17601740
申请日：2020-03-27
申请人： BASF SE
发明人： Chi Yueh Kao , Mei Chin Shen , Sheng Hsuan Wei , Daniel Loeffler , Andreas Klipp , Marcel Brill , Szilard Csihony , Frank Pirrung , Niklas Benjamin Heine
摘要： Described herein is a non-aqueous composition including (a) an organic protic solvent, (b) ammonia, and (c) at least one additive of formulae I or II where R1 is H R2 is selected from H, C1 to C10 alkyl, C1 to C10 alkoxy, C6 to C10 aryl, and C6 to C10 aroxy, R3 is selected from R2, R4 is selected from C1 to C10 alkyl, C1 to C10 alkoxy, C6 to C10 aryl, and C6 to C10 aroxy, R10, R12 are independently selected from C1 to C10 alkyl and C1 to C10 alkoxy, m is 1, 2 or 3, and n is 0 or an integer from 1 to 100.
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