公开(公告)号：US10541109B2

公开(公告)日：2020-01-21

申请号：US15660096

申请日：2017-07-26

Applicant: BATTELLE MEMORIAL INSTITUTE

Inventor： Bryan A. Stanfill ,  Sarah M. Reehl ,  Margaret C. Johnson ,  Lisa M. Bramer ,  Nigel D. Browning ,  Andrew J. Stevens ,  Libor Kovarik

IPC: H01J37/26 ,  H01J37/06 ,  H01J37/244

Abstract: Disclosed are methods for sensing conditions of an electron microscope system and/or a specimen analyzed thereby. Also disclosed are sensor systems and electron microscope systems able to sense system conditions, and/or conditions of the specimen being analyzed by such systems. In one embodiment, a sparse dataset can be acquired from a random sub-sampling of the specimen by an electron beam probe of the electron microscope system. Instrument parameters, specimen characteristics, or both can be estimated from the sparse dataset.

公开(公告)号：US20180033591A1

公开(公告)日：2018-02-01

申请号：US15660096

申请日：2017-07-26

Applicant: BATTELLE MEMORIAL INSTITUTE

Inventor： Bryan A. Stanfill ,  Sarah M. Reehl ,  Margaret C. Johnson ,  Lisa M. Bramer ,  Nigel D. Browning ,  Andrew J. Stevens ,  Libor Kovarik

IPC: H01J37/26 ,  H01J37/244 ,  H01J37/06

CPC classification number: H01J37/265 ,  H01J37/06 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/216 ,  H01J2237/226 ,  H01J2237/2814 ,  H01J2237/2817 ,  H01J2237/282 ,  H01J2237/2826

Abstract: Disclosed are methods for sensing conditions of an electron microscope system and/or a specimen analyzed thereby. Also disclosed are sensor systems and electron microscope systems able to sense system conditions, and/or conditions of the specimen being analyzed by such systems. In one embodiment, a sparse dataset can be acquired from a random sub-sampling of the specimen by an electron beam probe of the electron microscope system. Instrument parameters, specimen characteristics, or both can be estimated from the sparse dataset.