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公开(公告)号:US10656287B2
公开(公告)日:2020-05-19
申请号:US16374358
申请日:2019-04-03
Applicant: Battelle Memorial Institute
Inventor: David W. Gotthold , Andrew J. Stevens , Nigel D. Browning , Eric Jensen , Nathan L. Canfield , Alan G. Joly
Abstract: A method includes directing a probe beam to a target that includes an array of data portions in a data storage medium arranged so that a beam area of the probe beam extends across a plurality of adjacent data portions, the array including a data portion subset with each data portion of the subset responsive to the probe beam to produce a response illumination, receiving the response illumination at a detector, and determining data values corresponding to the plurality of adjacent data portions based on the received response illumination. Apparatus and systems are also disclosed.
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公开(公告)号:US10109453B2
公开(公告)日:2018-10-23
申请号:US15075031
申请日:2016-03-18
Applicant: Battelle Memorial Institute
Inventor: Andrew J. Stevens , Libor Kovarik , Nigel D. Browning , Andrey V. Liyu
IPC: H01J37/22 , G03F7/20 , G03F7/30 , H01J37/244 , H01J37/26
Abstract: Transmission microscopy imaging systems include a mask and/or other modulator situated to encode image beams, e.g., by deflecting the image beam with respect to the mask and/or sensor. The beam is modulated/masked either before or after transmission through a sample to induce a spatially and/or temporally encoded signal by modifying any of the beam/image components including the phase/coherence, intensity, or position of the beam at the sensor. For example, a mask can be placed/translated through the beam so that several masked beams are received by a sensor during a single sensor integration time. Images associated with multiple mask displacements are then used to reconstruct a video sequence using a compressive sensing method. Another example of masked modulation involves a mechanism for phase-retrieval, whereby the beam is modulated by a set of different masks in the image plane and each masked image is recorded in the diffraction plane.
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3.
公开(公告)号:US20180033591A1
公开(公告)日:2018-02-01
申请号:US15660096
申请日:2017-07-26
Applicant: BATTELLE MEMORIAL INSTITUTE
Inventor: Bryan A. Stanfill , Sarah M. Reehl , Margaret C. Johnson , Lisa M. Bramer , Nigel D. Browning , Andrew J. Stevens , Libor Kovarik
IPC: H01J37/26 , H01J37/244 , H01J37/06
CPC classification number: H01J37/265 , H01J37/06 , H01J37/244 , H01J37/28 , H01J2237/216 , H01J2237/226 , H01J2237/2814 , H01J2237/2817 , H01J2237/282 , H01J2237/2826
Abstract: Disclosed are methods for sensing conditions of an electron microscope system and/or a specimen analyzed thereby. Also disclosed are sensor systems and electron microscope systems able to sense system conditions, and/or conditions of the specimen being analyzed by such systems. In one embodiment, a sparse dataset can be acquired from a random sub-sampling of the specimen by an electron beam probe of the electron microscope system. Instrument parameters, specimen characteristics, or both can be estimated from the sparse dataset.
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4.
公开(公告)号:US10541109B2
公开(公告)日:2020-01-21
申请号:US15660096
申请日:2017-07-26
Applicant: BATTELLE MEMORIAL INSTITUTE
Inventor: Bryan A. Stanfill , Sarah M. Reehl , Margaret C. Johnson , Lisa M. Bramer , Nigel D. Browning , Andrew J. Stevens , Libor Kovarik
IPC: H01J37/26 , H01J37/06 , H01J37/244
Abstract: Disclosed are methods for sensing conditions of an electron microscope system and/or a specimen analyzed thereby. Also disclosed are sensor systems and electron microscope systems able to sense system conditions, and/or conditions of the specimen being analyzed by such systems. In one embodiment, a sparse dataset can be acquired from a random sub-sampling of the specimen by an electron beam probe of the electron microscope system. Instrument parameters, specimen characteristics, or both can be estimated from the sparse dataset.
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公开(公告)号:US10256072B2
公开(公告)日:2019-04-09
申请号:US15666159
申请日:2017-08-01
Applicant: BATTELLE MEMORIAL INSTITUTE
Inventor: Andrew J. Stevens , Libor Kovarik , Andrey V. Liyu , Nigel D. Browning
Abstract: Disclosed are methods for optimized sub-sampling in an electron microscope. With regard at least to utilization of electron dose budgets, of time for acquisition of measurements, and of computing/processing capabilities, very high efficiencies can be achieved by informing and/or adapting subsequent sub-sampling measurements according to one or more earlier-acquired sparse datasets and/or according to analyzes thereof.
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公开(公告)号:US20180321390A1
公开(公告)日:2018-11-08
申请号:US15589413
申请日:2017-05-08
Applicant: Battelle Memorial Institute
Inventor: David W. Gotthold , Andrew J. Stevens , Nigel D. Browning , Eric Jensen , Nathan L. Canfield , Alan G. Joly
CPC classification number: G01T1/115 , G06F3/0325
Abstract: A method includes directing a probe beam to a target that includes an array of data portions in a data storage medium arranged so that a beam area of the probe beam extends across a plurality of adjacent data portions, the array including a data portion subset with each data portion of the subset responsive to the probe beam to produce a response illumination, receiving the response illumination at a detector, and determining data values corresponding to the plurality of adjacent data portions based on the received response illumination. Apparatus and systems are also disclosed.
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7.
公开(公告)号:US20170025247A1
公开(公告)日:2017-01-26
申请号:US15286502
申请日:2016-10-05
Applicant: Battelle Memorial Institute
Inventor: Andrew J. Stevens , Libor Kovarik , Nigel D. Browning
CPC classification number: H01J37/222 , G01T1/00 , G03F7/20 , G03F7/30 , H01J37/09 , H01J37/20 , H01J37/244 , H01J37/26 , H01J37/28 , H01J2237/0453 , H01J2237/226 , H01J2237/24455 , H01J2237/2802
Abstract: Transmission microscopy imaging systems include a mask and/or other modulator situated to encode image beams, e.g., by deflecting the image beam with respect to the mask and/or sensor. The beam is modulated/masked either before or after transmission through a sample to induce a spatially and/or temporally encoded signal by modifying any of the beam/image components including the phase/coherence, intensity, or position of the beam at the sensor. For example, a mask can be placed/translated through the beam so that several masked beams are received by a sensor during a single sensor integration time. Images associated with multiple mask displacements are then used to reconstruct a video sequence using a compressive sensing method. Another example of masked modulation involves a mechanism for phase-retrieval, whereby the beam is modulated by a set of different masks in the image plane and each masked image is recorded in the diffraction plane.
Abstract translation: 透射显微镜成像系统包括掩模和/或其它调制器,其位于编码图像束,例如通过相对于掩模和/或传感器偏转图像束。 在通过样本传输之前或之后,波束被调制/屏蔽,以通过修改包括传感器上的波束的相位/相干性,强度或位置的任何波束/图像分量来诱导空间和/或时间编码的信号。 例如,可以通过光束放置/平移掩模,使得在单个传感器积分时间期间,传感器接收多个屏蔽光束。 然后使用与多个掩模位移相关联的图像来使用压缩感测方法重建视频序列。 掩模调制的另一示例涉及相位检索的机制,由此通过图像平面中的一组不同的掩模来调制光束,并且每个被掩蔽的图像被记录在衍射平面中。
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公开(公告)号:US10580614B2
公开(公告)日:2020-03-03
申请号:US15482629
申请日:2017-04-07
Applicant: Battelle Memorial Institute
Inventor: Andrew J. Stevens , Libor Kovarik , Nigel D. Browning
IPC: H01J37/28 , H01J37/22 , H01J37/244 , G01N23/00
Abstract: Mask-modulated spectra are incident to a sensor and are summed during a frame time. After the frame time, a compressed spectrum is read out based on the sum and decompressed to obtain spectra for some or all specimen locations. The mask-modulated spectrum that are summed are associated with different modulations produced by a common mask.
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公开(公告)号:US10295677B2
公开(公告)日:2019-05-21
申请号:US15589413
申请日:2017-05-08
Applicant: Battelle Memorial Institute
Inventor: David W. Gotthold , Andrew J. Stevens , Nigel D. Browning , Eric Jensen , Nathan L. Canfield , Alan G. Joly
Abstract: A method includes directing a probe beam to a target that includes an array of data portions in a data storage medium arranged so that a beam area of the probe beam extends across a plurality of adjacent data portions, the array including a data portion subset with each data portion of the subset responsive to the probe beam to produce a response illumination, receiving the response illumination at a detector, and determining data values corresponding to the plurality of adjacent data portions based on the received response illumination. Apparatus and systems are also disclosed.
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公开(公告)号:US20160276050A1
公开(公告)日:2016-09-22
申请号:US15075031
申请日:2016-03-18
Applicant: Battelle Memorial Institute
Inventor: Andrew J. Stevens , Libor Kovarik , Nigel D. Browning , Andrey V. Liyu
CPC classification number: H01J37/222 , G03F7/20 , G03F7/30 , H01J37/244 , H01J37/26 , H01J2237/0451 , H01J2237/0453 , H01J2237/226 , H01J2237/24455 , H01J2237/2802
Abstract: Transmission microscopy imaging systems include a mask and/or other modulator situated to encode image beams, e.g., by deflecting the image beam with respect to the mask and/or sensor. The beam is modulated/masked either before or after transmission through a sample to induce a spatially and/or temporally encoded signal by modifying any of the beam/image components including the phase/coherence, intensity, or position of the beam at the sensor. For example, a mask can be placed/translated through the beam so that several masked beams are received by a sensor during a single sensor integration time. Images associated with multiple mask displacements are then used to reconstruct a video sequence using a compressive sensing method. Another example of masked modulation involves a mechanism for phase-retrieval, whereby the beam is modulated by a set of different masks in the image plane and each masked image is recorded in the diffraction plane.
Abstract translation: 透射显微镜成像系统包括掩模和/或其它调制器,其位于编码图像束,例如通过相对于掩模和/或传感器偏转图像束。 在通过样本传输之前或之后,波束被调制/屏蔽,以通过修改包括传感器上的波束的相位/相干性,强度或位置的任何波束/图像分量来诱导空间和/或时间编码的信号。 例如,可以通过光束放置/平移掩模,使得在单个传感器积分时间期间,传感器接收多个屏蔽光束。 然后使用与多个掩模位移相关联的图像来使用压缩感测方法重建视频序列。 掩模调制的另一示例涉及相位检索的机制,由此通过图像平面中的一组不同的掩模来调制光束,并且每个被掩蔽的图像被记录在衍射平面中。
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