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公开(公告)号:US2871111A
公开(公告)日:1959-01-27
申请号:US69839357
申请日:1957-11-25
Applicant: BELL TELEPHONE LABOR INC
Inventor: BACON DONALD D , SCAFF JACK H , THEUERER HENRY C
IPC: C25F3/12 , H01L21/306
CPC classification number: H01L21/02052 , C25F3/12 , H01L21/30608 , Y10S438/904