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公开(公告)号:US2989385A
公开(公告)日:1961-06-20
申请号:US65904857
申请日:1957-05-14
Applicant: BELL TELEPHONE LABOR INC
Inventor: GIANOLA UMBERTO F , SHARP LEILA V
IPC: C01B33/08 , C22F1/16 , C23F1/24 , H01J37/34 , H01L21/00 , H01L21/265 , H01L21/306
CPC classification number: H01L21/306 , C01B33/08 , C22F1/16 , H01J37/34 , H01L21/00 , H01L21/26506