THIN FILM TRANSISTOR AND MANUFACTURING METHOD THEREOF, AND ARRAY SUBSTRATE
    2.
    发明申请
    THIN FILM TRANSISTOR AND MANUFACTURING METHOD THEREOF, AND ARRAY SUBSTRATE 有权
    薄膜晶体管及其制造方法和阵列基板

    公开(公告)号:US20140070217A1

    公开(公告)日:2014-03-13

    申请号:US13963372

    申请日:2013-08-09

    CPC classification number: H01L29/78669 H01L29/66757 H01L29/66765

    Abstract: The disclosure discloses a thin film transistor and a manufacturing method thereof, an array substrate, and a display device, which can manufacture a thin film transistor with lower contents of impurity at a low temperature. The thin film transistor comprises: a substrate, and an active layer disposed on the substrate, the active layer comprising a source region, a drain region and a channel region, wherein the active layer is formed by depositing an inducing metal on an amorphous silicon layer on the substrate by an atomic layer deposition (ALD) method and then conducting heat treatment on the amorphous silicon layer deposited with the inducing metal so that metal induction crystallization and metal induction lateral crystallization take place in the amorphous silicon layer.

    Abstract translation: 本发明公开了一种薄膜晶体管及其制造方法,阵列基板和显示装置,其可以在低温下制造具有较低杂质含量的薄膜晶体管。 所述薄膜晶体管包括:衬底和设置在所述衬底上的有源层,所述有源层包括源极区,漏极区和沟道区,其中所述有源层通过在非晶硅层上沉积诱导金属而形成 通过原子层沉积(ALD)方法在衬底上,然后对沉积有诱导金属的非晶硅层进行热处理,使得金属诱导结晶和金属诱导横向结晶发生在非晶硅层中。

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