Thin-film transistor and manufacturing method thereof

    公开(公告)号:US11764308B2

    公开(公告)日:2023-09-19

    申请号:US17171602

    申请日:2021-02-09

    IPC分类号: H01L29/786 H01L29/66

    摘要: A body layer formed of a semiconductor layer, the body layer comprising, a first region, a second region, and a channel region positioned therebetween; a channel stopper formed on the channel region; source and drain electrodes electrically connected to the first and second regions via first and second contact layers respectively are provided. Each of the first and second contact layers comprises an impurities-containing first amorphous silicon layer; a thickness of each of the first and second regions is less than a thickness of the channel region; and the first and second regions comprise a second amorphous silicon layer containing impurities in a concentration being less than a concentration of impurities contained in the first amorphous silicon layer. This makes it possible to suppress a photoexcited current and improve the aperture ratio in a case that a display apparatus is configured.