SUBSTRATE INSPECTION DEVICE AND METHOD
    2.
    发明申请
    SUBSTRATE INSPECTION DEVICE AND METHOD 有权
    基板检查装置及方法

    公开(公告)号:US20160363791A1

    公开(公告)日:2016-12-15

    申请号:US14895703

    申请日:2015-07-17

    摘要: A substrate inspection device and method are disclosed. The substrate inspection device includes a conveyance stage for carrying the substrate on its surface; a region scanning camera located at a first side of the conveyance stage, provided to be opposite to the surface, and configured for inspecting standard specification of the substrate; a line scanning camera located at the first side of the conveyance stage, provided to be opposite to the surface, and configured for inspecting edge line and size of the substrate; and a light source located at a second side of the conveyance stage opposite to the first side, configured for irradiating light rays onto the substrate, so as to be utilized by the region scanning camera and the line scanning camera for inspecting the substrate.

    摘要翻译: 公开了一种基板检查装置和方法。 基板检查装置包括用于在其表面上承载基板的输送台; 位于所述输送台的与所述表面相对的第一侧的区域扫描照相机,被构造成用于检查所述基板的标准规格; 位于所述传送台的与所述表面相对的第一侧的行扫描照相机,被构造成用于检查所述基板的边缘线和尺寸; 以及位于所述输送台的与所述第一侧相反的第二侧的光源,被配置为将光线照射到所述基板上,以被所述区域扫描照相机和所述行扫描照相机用于检查所述基板。