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公开(公告)号：US20240275009A1
公开(公告)日：2024-08-15
申请号：US18019553
申请日：2022-01-25
发明人： Jianxing LIU , Jingwen GUO , Qianhong WU , Chunxin LI , Zibo CAO , Jianyun ZHAO , Feng QU
摘要： A phase shifter includes: a first substrate; a signal electrode, a first reference electrode, and a second reference electrode which are on the first substrate; a first insulating layer covering at least a side of the signal electrode distal to the first substrate; and at least one film-bridge electrode group on a side of the first insulating layer distal to the signal electrode. Each film-bridge electrode group includes film-bridge electrodes insulated from each other, and an orthogonal projection of the signal electrode on the first substrate is between orthogonal projections of the first and second reference electrodes on the first substrate. An orthogonal projection of a bridge floor of each film-bridge electrode on the first substrate partially overlaps the orthogonal projection of the signal electrode. Distances between bridge floors of the film-bridge electrodes in a same film-bridge electrode group and the signal electrode are different from each other.
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公开(公告)号：US20240279050A1
公开(公告)日：2024-08-22
申请号：US18024565
申请日：2022-06-29
发明人： Zibo CAO , Yingli SHI , Jingwen GUO , Chunxin LI , Qianhong WU , Jianyun ZHAO , Jianxing LIU , Feng QU
CPC分类号： B81B3/0072 , B81C1/00142 , B81B2201/018 , B81B2203/0109 , B81B2203/0127 , B81B2203/04 , B81B2203/053
摘要： The present disclosure provides an MEMS switch device and an electronic apparatus. The MEMS switch device includes a base substrate, a membrane bridge structure, and a first ground line, a signal line and a second ground line sequentially arranged on a first side surface of the base substrate at intervals; the membrane bridge structure has a first end electrically connected to the first ground line, and a second end, opposite to the first end, electrically connected to the second ground line; and the membrane bridge structure includes a membrane bridge body structure and at least one protruding structure on the membrane bridge body structure, where the protruding structure protrudes from the membrane bridge body structure in a direction perpendicular to the first side surface of the base substrate.
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