公开(公告)号：US10665454B2

公开(公告)日：2020-05-26

申请号：US15973664

申请日：2018-05-08

申请人： BOE TECHNOLOGY GROUP CO., LTD. ,  Ordos Yuansheng Optoelectronics Co., Ltd.

发明人： Jingshuai Wang ,  Chul Ho Lee ,  Yongzhi Hao ,  Xiaoqiang Han ,  Zhanpeng Zhang ,  Guimei Zhang

IPC分类号： H01L21/36 ,  H01L21/02 ,  H01L21/687 ,  H01L27/12 ,  H01L21/67 ,  B23K26/00 ,  B23K26/12 ,  B23K26/352 ,  B23K26/14 ,  B23K26/08 ,  B23K101/40 ,  B23K103/00

摘要： A laser annealing apparatus including a carrying platform with a fixing surface, a laser source and a driving device. The laser source is configured to emit a laser beam toward the fixing surface, the laser beam having an illumination area which covers a center of the fixing surface and extends toward an edge of the fixing surface, in an extending direction of the illumination area the illumination area having a length which is not less than a distance between the center of the fixing surface and the edge of the fixing surface. The driving device is configured to drive the carrying platform to rotate around the center of the fixing surface.