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公开(公告)号：US10207284B2
公开(公告)日：2019-02-19
申请号：US15137807
申请日：2016-04-25
IPC分类号： B05B13/02 , H01L21/67 , B05C5/02 , B05C17/005
摘要： Disclosed is a coating machine. The coating machine includes: a movable component, a plurality of nozzles and a pump, the plurality of nozzles are sequentially arranged along the length direction of the movable component, the pump is configured for pumping coating agents into the nozzles, the movable component can drive the nozzles to move, and coating agents are coated on substrates by the nozzles with the movement of the nozzles.
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公开(公告)号：US10112218B2
公开(公告)日：2018-10-30
申请号：US15085318
申请日：2016-03-30
发明人： Jin Hu , Xiangming Meng , Changkai Jie
摘要： The present disclosure relates to a chamber cleaning apparatus and a control method thereof. The chamber cleaning apparatus comprises: a controller for providing control signals, a supplying device, and a cleaning rail provided within the chamber. The supplying device has a first working position and a second working position, the first working position corresponding to a conveyance entrance, and the second working position corresponding to a conveyance outlet; the supplying device comprises at least two scrolls, and cleaning cloth partly on the cleaning rail; the scroll at the first working position is connected to one end of the cleaning cloth, for conveying the cleaning cloth from the conveyance entrance to the cleaning rail, and the scroll at the second working position is connected to the other end of the cleaning cloth, for collecting the cleaning cloth passing through the conveyance outlet.
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公开(公告)号：US20160325295A1
公开(公告)日：2016-11-10
申请号：US15137807
申请日：2016-04-25
CPC分类号： B05B13/0278 , B05C5/0254 , B05C5/0258 , B05C5/027 , B05C5/0279 , B05C17/00506 , H01L21/6715
摘要： Disclosed is a coating machine. The coating machine includes: a movable component, a plurality of nozzles and a pump, the plurality of nozzles are sequentially arranged along the length direction of the movable component, the pump is configured for pumping coating agents into the nozzles, the movable component can drive the nozzles to move, and coating agents are coated on substrates by the nozzles with the movement of the nozzles.
摘要翻译： 公开了一种涂布机。 涂布机包括：可移动部件，多个喷嘴和泵，沿着可移动部件的长度方向依次布置多个喷嘴，泵被配置为将涂覆剂泵送到喷嘴中，可移动部件可以驱动 移动的喷嘴和涂覆剂通过喷嘴的移动由喷嘴涂覆在基板上。
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