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公开(公告)号：US09751709B2
公开(公告)日：2017-09-05
申请号：US15094455
申请日：2016-04-08
发明人： Kun Li , Wenjun Shen , Bin Wu , Xuequan Yu , Xiaodong Yu , Zhuyi Luo
CPC分类号： B65H5/062 , B65H7/02 , B65H2404/1441 , B65H2511/20 , B65H2511/224 , B65H2513/40 , B65H2515/34 , B65H2553/512 , B65H2557/264 , B65H2220/02 , B65H2220/03 , B65H2220/01
摘要： The invention discloses a clearance adjusting apparatus, a clearance adjusting method and a conveyance device. The clearance adjusting apparatus is used for adjusting a clearance between two opposite rollers and comprises: a driver for driving the roller to move up and down, at least one of the rollers being movable relative to the other; and a controller that stores a predetermined clearance scope being connected with the driver for controlling the driver to drive the movable roller to move up and down, so that the clearance between the two rollers falls into the predetermined clearance scope.
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公开(公告)号：US20160325295A1
公开(公告)日：2016-11-10
申请号：US15137807
申请日：2016-04-25
CPC分类号： B05B13/0278 , B05C5/0254 , B05C5/0258 , B05C5/027 , B05C5/0279 , B05C17/00506 , H01L21/6715
摘要： Disclosed is a coating machine. The coating machine includes: a movable component, a plurality of nozzles and a pump, the plurality of nozzles are sequentially arranged along the length direction of the movable component, the pump is configured for pumping coating agents into the nozzles, the movable component can drive the nozzles to move, and coating agents are coated on substrates by the nozzles with the movement of the nozzles.
摘要翻译： 公开了一种涂布机。 涂布机包括：可移动部件，多个喷嘴和泵，沿着可移动部件的长度方向依次布置多个喷嘴，泵被配置为将涂覆剂泵送到喷嘴中，可移动部件可以驱动 移动的喷嘴和涂覆剂通过喷嘴的移动由喷嘴涂覆在基板上。
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公开(公告)号：US10207284B2
公开(公告)日：2019-02-19
申请号：US15137807
申请日：2016-04-25
IPC分类号： B05B13/02 , H01L21/67 , B05C5/02 , B05C17/005
摘要： Disclosed is a coating machine. The coating machine includes: a movable component, a plurality of nozzles and a pump, the plurality of nozzles are sequentially arranged along the length direction of the movable component, the pump is configured for pumping coating agents into the nozzles, the movable component can drive the nozzles to move, and coating agents are coated on substrates by the nozzles with the movement of the nozzles.
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公开(公告)号：US09910356B2
公开(公告)日：2018-03-06
申请号：US14894699
申请日：2015-04-27
发明人： Lei Zhang , Zhuyi Luo , Xiangming Meng , Jinho Youn , Jianqiang Guo , Honglin Liao
CPC分类号： G03F7/2022 , G03F7/0007 , G03F7/16 , G03F7/2008 , G03F7/203 , G03F7/32 , G03F7/40
摘要： A method of patterning a thin film is provided. The method includes coating a thin film layer and photoresist on a surface of a substrate; forming a first partially cured zone by performing a first exposing process of the photoresist with a mask, wherein exposing energy applied to the photoresist of the first partially cured zone is less than a photosensitive threshold of the photoresist; forming a cured zone on the first partially cured zone by performing a second exposing process of the photoresist with the mask, wherein a width of the cured zone is less than a width of the first partially cured zone, and exposing energy applied to the photoresist of the cured zone is equal to or greater than the photosensitive threshold of the photoresist; developing the photoresist; etching the thin film layer that is not covered by the photoresist; and removing the photoresist of the cured zone.
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