公开(公告)号：US20030235786A1

公开(公告)日：2003-12-25

申请号：US10180625

申请日：2002-06-25

Applicant: BREWER SCIENCE, INC.

Inventor： Vandana Krishnamurthy ,  Charles J. Neef ,  Juliet A.M. Snook

IPC: G03F007/30 ,  G03F007/38 ,  G03F007/11 ,  B32B009/00 ,  B32B019/00 ,  C08G063/48 ,  C08L071/12 ,  B05D005/12 ,  B05D003/02 ,  B05D003/12

CPC classification number: C08G79/10 ,  C08G79/00 ,  C08L85/00 ,  G03F7/091 ,  Y10S430/106 ,  Y10S430/11 ,  Y10S430/111 ,  Y10S430/151

Abstract: Anti-reflective compositions and methods of using these compositions to form circuits are provided. The compositions comprise a polymer dissolved or dispersed in a solvent system. In a preferred embodiment, the polymers of the composition include recurring units having the formula 1 where X is a light-attenuating moiety, M is a metal, and each R is individually selected from the group consisting of hydrogen, alkyls, aryls, alkoxys, and phenoxys. The resulting compositions are spin bowl compatible (i.e., they do not crosslink prior to the bake stages of the microlithographic processes or during storage at room temperature), are wet developable, and have superior optical properties.

Abstract translation: 提供了抗反射组合物和使用这些组合物形成电路的方法。 组合物包含溶解或分散在溶剂体系中的聚合物。 在优选的实施方案中，组合物的聚合物包括具有下式的重复单元：其中X是光衰减部分，M是金属，并且每个R各自选自氢，烷基，芳基，烷氧基和 苯氧基 所得到的组合物是旋转碗相容的（即，它们在微光刻工艺的烘烤阶段之前或在室温下储存期间不交联）是湿显影的并且具有优异的光学性能。