Bipolar staggered comb drive for bidirectional MEMS actuation

    公开(公告)号:US11909332B2

    公开(公告)日:2024-02-20

    申请号:US17395314

    申请日:2021-08-05

    摘要: Embodiments of the disclosure provide a comb drive, a comb drive system, and a method of operating the comb drive to rotate bi-directionally in a MEMS environment. An exemplary comb drive system may include a comb drive, at least one power source, and a controller. The comb drive may include a stator comb having a first electrically conductive layer spaced apart from a second electrically conductive layer. The comb drive may also include a rotor comb having a first electrically conductive layer spaced apart from a second electrically conductive layer. The controller may be configured to apply first and second voltage levels having opposite polarities to the first and second electrically conductive layers of the rotor comb, respectively. The controller may also be configured to apply an intermediate voltage level to one of the first or second electrically conductive layers of the stator comb.

    Galvo design with improvements on structure stability and mirror protection

    公开(公告)号:US11500196B2

    公开(公告)日:2022-11-15

    申请号:US16869513

    申请日:2020-05-07

    IPC分类号: G02B26/08 G02B26/10 G01S7/481

    摘要: Disclosed herein are techniques for improving structural stability and duration of light beam steering components in a LiDAR system. A galvo mirror assembly for light detection and ranging includes a top bracket including a first rotatable unit configured to rotate around an axis; a bottom bracket aligned with the top bracket and including a second rotatable unit configured to rotate around the axis; a mirror including a top end and a bottom end, where the top end of the mirror is coupled to the first rotatable unit of the top bracket and the bottom end of the mirror is coupled to the second rotatable unit of the bottom bracket, such that the mirror is rotatable around the axis; and an enhance plate extending between and non-rotatably coupled to the top bracket and the bottom bracket. The enhance plate is spaced apart from the mirror.

    DETECTION AND RANGING OPERATION OF CLOSE PROXIMITY OBJECT

    公开(公告)号:US20220206115A1

    公开(公告)日:2022-06-30

    申请号:US17137224

    申请日:2020-12-29

    摘要: In one example, an apparatus is provided. The apparatus is part of a Light Detection and Ranging (LiDAR) module and comprises a transmitter circuit, a receiver circuit, and a controller. The receiver circuit comprises a photodetector configured to convert a light signal into a photocurrent signal. The controller is configured to: transmit, using the transmitter circuit, a first light signal; receive, using the photodetector of the receiver circuit, a second light signal; determine whether the second light signal includes a scatter signal coupled from the transmitter circuit, and a reflected first light signal; and based on whether the second light signal includes the scatter signal and the reflected first light signal, determine a time-of-flight of the first light signal based on one of: a width of the second light signal, or a time difference between the transmission of the first light signal and the reception of the second light signal.

    ELECTRO-OPTICAL BEAM DEFLECTING UNIT FOR LIGHT DETECTION AND RANGING (LIDAR)

    公开(公告)号:US20210373128A1

    公开(公告)日:2021-12-02

    申请号:US16886593

    申请日:2020-05-28

    IPC分类号: G01S7/48 G01S17/931 G01S7/481

    摘要: Embodiments of the disclosure provide receivers for light detection and ranging (LiDAR). In an example, a receiver includes a beam converging device and an EO beam deflecting unit. The beam converging device is configured to receive a laser beam from an object being scanned by the LiDAR and form an input laser beam. The EO beam deflecting unit is configured to generate a non-uniform medium having at least one of a refractive index gradient or a diffraction grating, receive the input laser beam such that the input laser beam impinges upon the non-uniform medium, and form an output laser beam towards a photosensor. An angle between the input and the output laser beams is nonzero.

    BIPOLAR STAGGERED COMB DRIVE FOR BIDIRECTIONAL MEMS ACTUATION

    公开(公告)号:US20210367536A1

    公开(公告)日:2021-11-25

    申请号:US17395314

    申请日:2021-08-05

    摘要: Embodiments of the disclosure provide a comb drive, a comb drive system, and a method of operating the comb drive to rotate bi-directionally in a MEMS environment. An exemplary comb drive system may include a comb drive, at least one power source, and a controller. The comb drive may include a stator comb having a first electrically conductive layer spaced apart from a second electrically conductive layer. The comb drive may also include a rotor comb having a first electrically conductive layer spaced apart from a second electrically conductive layer. The controller may be configured to apply first and second voltage levels having opposite polarities to the first and second electrically conductive layers of the rotor comb, respectively. The controller may also be configured to apply an intermediate voltage level to one of the first or second electrically conductive layers of the stator comb.

    Light detection and ranging (LiDAR) system using a wavelength converter

    公开(公告)号:US11175385B2

    公开(公告)日:2021-11-16

    申请号:US16103922

    申请日:2018-08-14

    摘要: Embodiments of the disclosure provide an apparatus for emitting laser light and a system and method for detecting laser light returned from an object. The system includes a transmitter and a receiver. The transmitter includes one or more laser sources, at least one of the laser sources configured to provide a respective native laser beam having a wavelength above 1,100 nm. The transmitter also includes a wavelength converter configured to receive the native laser beams provided by the laser sources and convert the native laser beams into a converted laser beam having a wavelength below 1,100 nm. The transmitter further includes a scanner configured to emit the converted laser beam to the object in a first direction. The receiver is configured to detect a returned laser beam having a wavelength below 1,100 nm and returned from the object in a second direction.

    HYBRID DETECTORS FOR VARIOUS DETECTION RANGE IN LIDAR

    公开(公告)号:US20210349192A1

    公开(公告)日:2021-11-11

    申请号:US16869403

    申请日:2020-05-07

    摘要: A light detection and ranging system includes a receiver that includes a first photodetector configured to detect individual photons, a second photodetector characterized by a linear response to an intensity level of incident light, and a receiver optic device. The receiver optic device collects returned light from a first field of view and a second field of view of the receiver, directs the returned light from the first field of view of the receiver to the first photodetector, and directs the returned light from the second field of view of the receiver to the second photodetector.