公开(公告)号：US07512303B2

公开(公告)日：2009-03-31

申请号：US11769070

申请日：2007-06-27

申请人： Benjamin F. Catching ,  Donald M. Friedrich ,  Charles A. Hulse ,  Marc K. Von Gunten ,  Jason Reed ,  Karl Kissa ,  Glen Drake ,  Julia Duncan ,  William J. Minford ,  Hiren V. Shah ,  Jerry Zieba ,  Jason Jiazhan Xu

发明人： Benjamin F. Catching ,  Donald M. Friedrich ,  Charles A. Hulse ,  Marc K. Von Gunten ,  Jason Reed ,  Karl Kissa ,  Glen Drake ,  Julia Duncan ,  William J. Minford ,  Hiren V. Shah ,  Jerry Zieba ,  Jason Jiazhan Xu

IPC分类号： G02B6/10

CPC分类号： G02F1/377 ,  G02B6/13 ,  G02B6/1342 ,  G02B2006/1204 ,  G02B2006/12097 ,  G02F2201/06 ,  G02F2201/07

摘要： The invention relates to a wafer scale process for the manufacture of optical waveguide devices, and particularly for the manufacture of ridge waveguide devices, and the improved waveguides made thereby. The present invention has found a process for achieving sub-micron control of an optical waveguiding layer thickness by providing a dimensionally stable wafer assembly into which adhesive can be introduced without altering the planar relationship between a carrier wafer and an optically transmissive wafer in wafer scale manufacture. This process permits wafer scale manufacture of optical waveguide devices including thin optically transmissive layers. A pattern of spacer pedestals is created by a deposition and etch back, or by a surface etch process to precisely reference surface information from a master surface to a carrier wafer to a thin optically transmissive wafer. The tolerance achievable in accordance with this process provides consistent yield across the wafer.

摘要翻译： 本发明涉及一种用于制造光波导器件的晶片刻度工艺，特别涉及脊波导器件的制造以及由此制成的改进的波导。 本发明已经发现了一种通过提供尺寸稳定的晶片组件来实现光学波导层厚度的亚微米控制的方法，其中可以引入粘合剂而不改变晶片规模制造中的载体晶片和光学透射晶片之间的平面关系 。 该方法允许晶圆级制造包括薄光学透射层的光波导器件。 通过沉积和回蚀，或通过表面蚀刻工艺来产生间隔基座的图案，以将表面信息从主表面精确地参考到载体晶片到薄的光学透射晶片。 根据该方法可实现的公差提供了跨晶片的一致产率。

公开(公告)号：US06388359B1

公开(公告)日：2002-05-14

申请号：US09517913

申请日：2000-03-03

申请人： Markus Duelli ,  Donald M. Friedrich ,  Bryant P. Hichwa

发明人： Markus Duelli ,  Donald M. Friedrich ,  Bryant P. Hichwa

IPC分类号： H01H5900

CPC分类号： G02B6/357 ,  G02B6/3514 ,  G02B6/3518 ,  G02B6/3546 ,  G02B6/358 ,  H01H59/0009 ,  H01H2001/0042

摘要： A switching signal having multiple sequential pulses is applied to a MEMS switch. A first pulse moves the switch from a first switch position toward a second switch position. After a selected dwell period, a second pulse is applied to dampen ringing or overshoot of the movable portions of the switch. In a further embodiment, non-symmetrical switching signals are used to cycle the switch from the first state to the second state, and back to the first.

摘要翻译： 具有多个连续脉冲的开关信号被施加到MEMS开关。 第一脉冲将开关从第一开关位置移动到第二开关位置。 在选定的停留时段之后，施加第二脉冲以阻止开关的可动部分的振铃或过冲。 在另一个实施例中，使用非对称切换信号将开关从第一状态循环到第二状态，并且返回到第一状态。

公开(公告)号：US06771001B2

公开(公告)日：2004-08-03

申请号：US09810825

申请日：2001-03-16

申请人： Minyao Mao ,  Donald M. Friedrich ,  Markus Duelli ,  Bryant Hichwa

发明人： Minyao Mao ,  Donald M. Friedrich ,  Markus Duelli ,  Bryant Hichwa

IPC分类号： H02N100

CPC分类号： H02N1/008

摘要： An electrostatic comb drive suitable for micro-electro-mechanical systems (“MEMS”) application uses shaped fingers to achieve bi-directional actuation from a unipolar actuation pulse. The finger shape also provides auto-braking of the movable member of the drive using a simple actuating pulse. In a further embodiment, an end stop inhibits overshoot and a back spring pushes the movable portion of the device back toward an operating position. In yet a further embodiment, a Vernier scale is provided on the movable portion of the drive relative to the fixed portion of the drive to indicate relative shift of these portions after the device is fabricated.

摘要翻译： 适用于微电子机械系统（“MEMS”）应用的静电梳驱动使用成形指状物从单极致动脉冲实现双向致动。 手指形状还使用简单的致动脉冲来提供驱动器的可移动部件的自动制动。 在另一个实施例中，端部止挡件阻止过冲，并且后弹簧将装置的可移动部分推回到操作位置。 在又一个实施例中，在驱动器的可移动部分上相对于驱动器的固定部分设置游标，以指示在制造装置之后这些部分的相对移动。

公开(公告)号：US07006204B2

公开(公告)日：2006-02-28

申请号：US10163062

申请日：2002-06-05

申请人： Paul G. Coombs ,  Donald M. Friedrich ,  Ken D. Cardell ,  Curtis R. Hruska ,  Charles T. Markantes

发明人： Paul G. Coombs ,  Donald M. Friedrich ,  Ken D. Cardell ,  Curtis R. Hruska ,  Charles T. Markantes

IPC分类号： G06K9/74

CPC分类号： G07D7/205 ,  G07D7/1205 ,  G07D7/121 ,  G07F7/086

摘要： An automated verification system for authenticating an object having an optical security feature includes an optical system, a transport staging apparatus, and an analyzing device. The optical system includes one or more light sources that are capable of generating either narrowband or broadband light beams. The transport staging apparatus cooperates with the light sources and is configured to position the object such that one or more of the light beams strike a portion of the object where the security feature should be located. The analyzing device receives the light beams reflected or transmitted from the object and is adapted to analyze the optical characteristics of the light beams at varying angles and/or wavelengths to verify the authenticity of the object.

公开(公告)号：US06473165B1

公开(公告)日：2002-10-29

申请号：US09489453

申请日：2000-01-21

申请人： Paul G. Coombs ,  Donald M. Friedrich ,  Ken D. Cardell ,  Curtis R. Hruska ,  Charles T. Markantes

发明人： Paul G. Coombs ,  Donald M. Friedrich ,  Ken D. Cardell ,  Curtis R. Hruska ,  Charles T. Markantes

IPC分类号： G06K974

CPC分类号： G07D7/205 ,  G07D7/1205 ,  G07D7/121 ,  G07F7/086

摘要： An automated verification system for authenticating an object having an optical security feature includes an optical system, a transport staging apparatus, and an analyzing device. The optical system includes one or more light sources that are capable of generating either narrowband or broadband light beams. The transport staging apparatus cooperates with the light sources and is configured to position the object such that one or more of the light beams strike a portion of the object where the security feature should be located. The analyzing device receives the light beams reflected or transmitted from the object and is adapted to analyze the optical characteristics of the light beams at varying angles and/or wavelengths to verify the authenticity of the object.

摘要翻译： 用于认证具有光学安全特征的对象的自动验证系统包括光学系统，传输分段设备和分析设备。 光学系统包括能够产生窄带或宽带光束的一个或多个光源。 运输分段设备与光源配合，并且被配置成定位物体，使得一个或多个光束照射安全特征应位于物体的一部分。 分析装置接收从物体反射或透射的光束，并且适于以变化的角度和/或波长分析光束的光学特性以验证物体的真实性。

公开(公告)号：US07184133B2

公开(公告)日：2007-02-27

申请号：US11140839

申请日：2005-05-31

申请人： Paul G. Coombs ,  Donald M. Friedrich ,  Ken D. Cardell ,  Curtis R. Hruska ,  Charles T. Markantes ,  Shaun McCaffery ,  Bruce Matson ,  Matthew R. Witzman ,  John Reinecke

发明人： Paul G. Coombs ,  Donald M. Friedrich ,  Ken D. Cardell ,  Curtis R. Hruska ,  Charles T. Markantes ,  Shaun McCaffery ,  Bruce Matson ,  Matthew R. Witzman ,  John Reinecke

IPC分类号： G06K9/74

CPC分类号： G07D7/205 ,  G07D7/1205 ,  G07D7/121 ,  G07F7/086

摘要： An automated verification system for authenticating an object having an optical security feature includes an optical system, a transport staging apparatus, and an analyzing device. The optical system includes one or more light sources that are capable of generating either narrowband or broadband light beams. The transport staging apparatus cooperates with the light sources and is configured to position the object such that one or more of the light beams strike a portion of the object where the security feature should be located. The analyzing device receives the light beams reflected or transmitted from the object and is adapted to analyze the optical characteristics of the light beams at varying angles and/or wavelengths to verify the authenticity of the object.

摘要翻译： 用于认证具有光学安全特征的对象的自动验证系统包括光学系统，传输分段设备和分析设备。 光学系统包括能够产生窄带或宽带光束的一个或多个光源。 运输分段设备与光源配合，并且被配置成定位物体，使得一个或多个光束照射安全特征应位于物体的一部分。 分析装置接收从物体反射或透射的光束，并且适于以变化的角度和/或波长分析光束的光学特性以验证物体的真实性。