公开(公告)号：US20150247795A1

公开(公告)日：2015-09-03

申请号：US14710095

申请日：2015-05-12

申请人： Curtis R. Hruska ,  Benjamin F. Catching ,  Marc K. Von Gunten

发明人： Curtis R. Hruska ,  Benjamin F. Catching ,  Marc K. Von Gunten

IPC分类号： G01N21/359

CPC分类号： G01N21/359 ,  G01J3/0218 ,  G01J3/0256 ,  G01J3/0272 ,  G01J3/10 ,  G01N2201/0221 ,  G01N2201/08

摘要： A lightpipe is coupled to a spectrometer based on a laterally variable optical filter. The lightpipe may be used for both guiding the illuminating light towards a sample and collecting light reflected or emitted by the sample upon illumination, for spectral measurements at a distance from the sample afforded by the lightpipe. The lightpipe may include a slab of homogeneous transparent material for unconstrained bidirectional propagation of light in bulk of the material. The lightpipe may be solid, hollow, or sectioned for separate guiding of the illuminating and the reflected light.

摘要翻译： 基于横向可变的滤光器将光管耦合到光谱仪。 光管可以用于将照明光引向样品并且在照射时收集由样品反射或发射的光，以在距离光管提供的样品一定距离处进行光谱测量。 光管可以包括均匀透明材料的平板，用于大量材料中的光的无约束双向传播。 光管可以是实心的，中空的或分段的，用于分别引导照明和反射光。

公开(公告)号：US07512303B2

公开(公告)日：2009-03-31

申请号：US11769070

申请日：2007-06-27

申请人： Benjamin F. Catching ,  Donald M. Friedrich ,  Charles A. Hulse ,  Marc K. Von Gunten ,  Jason Reed ,  Karl Kissa ,  Glen Drake ,  Julia Duncan ,  William J. Minford ,  Hiren V. Shah ,  Jerry Zieba ,  Jason Jiazhan Xu

发明人： Benjamin F. Catching ,  Donald M. Friedrich ,  Charles A. Hulse ,  Marc K. Von Gunten ,  Jason Reed ,  Karl Kissa ,  Glen Drake ,  Julia Duncan ,  William J. Minford ,  Hiren V. Shah ,  Jerry Zieba ,  Jason Jiazhan Xu

IPC分类号： G02B6/10

CPC分类号： G02F1/377 ,  G02B6/13 ,  G02B6/1342 ,  G02B2006/1204 ,  G02B2006/12097 ,  G02F2201/06 ,  G02F2201/07

摘要： The invention relates to a wafer scale process for the manufacture of optical waveguide devices, and particularly for the manufacture of ridge waveguide devices, and the improved waveguides made thereby. The present invention has found a process for achieving sub-micron control of an optical waveguiding layer thickness by providing a dimensionally stable wafer assembly into which adhesive can be introduced without altering the planar relationship between a carrier wafer and an optically transmissive wafer in wafer scale manufacture. This process permits wafer scale manufacture of optical waveguide devices including thin optically transmissive layers. A pattern of spacer pedestals is created by a deposition and etch back, or by a surface etch process to precisely reference surface information from a master surface to a carrier wafer to a thin optically transmissive wafer. The tolerance achievable in accordance with this process provides consistent yield across the wafer.

摘要翻译： 本发明涉及一种用于制造光波导器件的晶片刻度工艺，特别涉及脊波导器件的制造以及由此制成的改进的波导。 本发明已经发现了一种通过提供尺寸稳定的晶片组件来实现光学波导层厚度的亚微米控制的方法，其中可以引入粘合剂而不改变晶片规模制造中的载体晶片和光学透射晶片之间的平面关系 。 该方法允许晶圆级制造包括薄光学透射层的光波导器件。 通过沉积和回蚀，或通过表面蚀刻工艺来产生间隔基座的图案，以将表面信息从主表面精确地参考到载体晶片到薄的光学透射晶片。 根据该方法可实现的公差提供了跨晶片的一致产率。