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公开(公告)号：US06218911B1
公开(公告)日：2001-04-17
申请号：US09352999
申请日：1999-07-13
IPC分类号： H01H5900
CPC分类号： H01H59/0009 , H01H2001/0078 , H01H2059/0027
摘要： An RF switch and a process for fabricating an RF switch which includes multiple throws and can be fabricated utilizing only a single layer of metallization. The switch in accordance with the present invention includes an airbridge suspended beam disposed adjacent to one or more metal traces. One or more control pads are disposed adjacent to the airbridged suspended beam to operate the switch electrostatically. The suspended beam as well as the metal traces and contact pads are all fabricated with a single metallization layer. The switch is configured such that deflection of the beam is in a plane generally parallel to the plane of the substrate. By eliminating multiple metallization layers, the complexity for fabricating the switch is greatly reduced. Moreover, the switch configuration also allows multiple throws and multiple poles using a single level of metallization.
摘要翻译： RF开关和用于制造RF开关的过程，其包括多个投掷并且可以仅使用单个金属化层制造。 根据本发明的开关包括邻近一个或多个金属迹线设置的空中悬臂梁。 一个或多个控制焊盘被布置成与节气门悬挂梁相邻，以静电地操作开关。 悬挂梁以及金属轨迹和接触垫都用单个金属化层制造。 开关被配置成使得光束的偏转在大致平行于衬底的平面的平面中。 通过消除多个金属化层，大大减少了用于制造开关的复杂性。 此外，开关配置还允许使用单个金属化级别的多个引线和多极。
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公开(公告)号：US06613993B1
公开(公告)日：2003-09-02
申请号：US09936836
申请日：2001-09-18
申请人： Ralf Strümpler
发明人： Ralf Strümpler
IPC分类号： H01H5900
CPC分类号： H01H59/0009 , H01H1/20 , H01H9/34
摘要： The invention relates to a novel micro relay for switching electric currents, in which a movable contact piece 1 moves parallel to the substrate.
摘要翻译： 本发明涉及一种用于切换电流的新型微型继电器，其中可动接触片1平行于衬底移动。
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公开(公告)号：US06388359B1
公开(公告)日：2002-05-14
申请号：US09517913
申请日：2000-03-03
IPC分类号： H01H5900
CPC分类号： G02B6/357 , G02B6/3514 , G02B6/3518 , G02B6/3546 , G02B6/358 , H01H59/0009 , H01H2001/0042
摘要： A switching signal having multiple sequential pulses is applied to a MEMS switch. A first pulse moves the switch from a first switch position toward a second switch position. After a selected dwell period, a second pulse is applied to dampen ringing or overshoot of the movable portions of the switch. In a further embodiment, non-symmetrical switching signals are used to cycle the switch from the first state to the second state, and back to the first.
摘要翻译： 具有多个连续脉冲的开关信号被施加到MEMS开关。 第一脉冲将开关从第一开关位置移动到第二开关位置。 在选定的停留时段之后，施加第二脉冲以阻止开关的可动部分的振铃或过冲。 在另一个实施例中，使用非对称切换信号将开关从第一状态循环到第二状态，并且返回到第一状态。
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公开(公告)号：US06531668B1
公开(公告)日：2003-03-11
申请号：US09943451
申请日：2001-08-30
申请人： Qing Ma
发明人： Qing Ma
IPC分类号： H01H5900
CPC分类号： B81B3/007 , B81B2201/014 , B81B2201/0271 , B81B2203/0118 , B81B2203/0353 , B81B2203/04 , B81C2201/056 , H01H1/20 , H01H59/0009 , H01H2001/0084 , H01H2059/0036 , H01H2059/0063 , Y10T29/49002 , Y10T29/49016 , Y10T29/49082 , Y10T29/49105 , Y10T29/49128 , Y10T29/49147
摘要： A microelectromechanical system (MEMS) switch having a high-resonance-frequency beam is disclosed. The MEMS switch includes first and second spaced apart electrical contacts, and an actuating electrode. The beam is adapted to establish contact between the electrodes via electrostatic deflection of the beam as induced by the actuating electrode. The beam may have a cantilever or bridge structure, and may be hollow or otherwise shaped to have a high resonant frequency. Methods of forming the high-speed MEMS switch are also disclosed.
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公开(公告)号：US06506989B2
公开(公告)日：2003-01-14
申请号：US09812470
申请日：2001-03-20
申请人： Wanjun Wang
发明人： Wanjun Wang
IPC分类号： H01H5900
CPC分类号： H01H59/0009 , H01H2001/0078 , H01H2001/0084
摘要： A power switching device is disclosed that achieves a complete, mechanical “on” and “off” electrical circuit. The device is a rapid micro-relay that comprises two separate systems: a control driving signal system and a voltage delivery system. Its electrostatic actuator and switching connectors are electrically separated, inhibiting interference between the two systems. The micro-relay can optionally be adapted to support multiple voltage delivery systems for separate circuits.
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