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340 条记录 (耗时 0.032 秒)

    Method for reducing leaching in metal-coated MEMS
    1.
    发明授权
    Method for reducing leaching in metal-coated MEMS 有权
    金属涂层MEMS中减少浸出的方法

    公开(公告)号：US06616853B1

    公开(公告)日：2003-09-09

    申请号：US09799916

    申请日：2001-03-05

    申请人： Bevan Staple ,  David Miller ,  Lilac Muller

    发明人： Bevan Staple ,  David Miller ,  Lilac Muller

    IPC分类号： H01L2100

    CPC分类号： B81C1/00476 ,  B81B2201/042 ,  B81C2201/0133 ,  G02B6/3518

    摘要： A method is provided for preventing dopant leaching from a doped structural film during fabrication of a microelectromechanical system. A microstructure that includes the doped structural film, sacrificial material, and metallic material is produced with a combination of deposition, patterning, and etching techniques. The sacrificial material is dissolved with a release solution that has a substance destructive to the sacrificial material. This substance also acts as an electrolyte, forming a galvanic cell with the doped structural film and metallic material acting as electrodes. The effects of the galvanic cell are suppressed by including a nonionic detergent mixed in the release solution.

    摘要翻译： 提供了一种在微电子机械系统的制造期间防止掺杂的结构膜的掺杂剂浸出的方法。 包括掺杂的结构膜，牺牲材料和金属材料的微结构通过沉积，图案化和蚀刻技术的组合来生产。 牺牲材料用具有对牺牲材料具有破坏性的物质的释放溶液溶解。 该物质还用作电解质，形成具有掺杂结构膜和金属材料作为电极的原电池。 通过包括混合在脱模溶液中的非离子洗涤剂来抑制原电池的影响。

    Method for reducing leaching in metal-coated MEMS
    2.
    发明授权
    Method for reducing leaching in metal-coated MEMS 失效
    金属涂层MEMS中减少浸出的方法

    公开(公告)号：US06939574B2

    公开(公告)日：2005-09-06

    申请号：US10632698

    申请日：2003-08-01

    申请人： Bevan Staple ,  David Miller ,  Lilac Muller Muller

    发明人： Bevan Staple ,  David Miller ,  Lilac Muller Muller

    IPC分类号： B05D5/12 ,  B81C1/00 ,  B44C1/22 ,  H01L21/00

    CPC分类号： B81C1/00476 ,  B81B2201/042 ,  B81C2201/117

    摘要： A method is provided for preventing dopant leaching from a doped structural film during fabrication of a microelectromechanical system. A microstructure that includes the doped structural film, sacrificial material, and metallic material is produced with a combination of deposition, patterning, and etching techniques. The sacrificial material is dissolved with a release solution that has a substance destructive to the sacrificial material. This substance also acts as an electrolyte, forming a galvanic cell with the doped structural film and metallic material acting as electrodes. The effects of the galvanic cell are suppressed by including a nonionic detergent mixed in the release solution.

    摘要翻译： 提供了一种在微电子机械系统的制造期间防止掺杂的结构膜的掺杂剂浸出的方法。 包括掺杂的结构膜，牺牲材料和金属材料的微结构通过沉积，图案化和蚀刻技术的组合来生产。 牺牲材料用具有对牺牲材料具有破坏性的物质的释放溶液溶解。 该物质还用作电解质，形成具有掺杂结构膜和金属材料作为电极的原电池。 通过包括混合在脱模溶液中的非离子洗涤剂来抑制原电池的影响。

    Systems and methods for overcoming stiction
    6.
    发明授权
    Systems and methods for overcoming stiction 失效
    用于克服静止的系统和方法

    公开(公告)号：US06791235B2

    公开(公告)日：2004-09-14

    申请号：US10719857

    申请日：2003-11-20

    申请人： David Miller ,  Lilac Muller ,  Robert L. Anderson

    发明人： David Miller ,  Lilac Muller ,  Robert L. Anderson

    IPC分类号： H02N200

    CPC分类号： G02B6/352 ,  B81B2201/042 ,  B81C1/00968 ,  G02B6/3512 ,  G02B6/3518 ,  G02B6/3548 ,  G02B6/356 ,  G02B6/3564 ,  G02B6/3568 ,  G02B6/357 ,  G02B6/3584 ,  G02B26/0841 ,  H02N1/002 ,  H02N1/006

    摘要： A number of methods and systems for overcoming stiction are provided. The systems include electro-mechanical systems capable of exerting a variety of forces upon areas prone to stiction. The systems can be MEMS arrays or other types of devices where stiction related forces occur. The methods include a variety of ways of causing movement in areas prone to stiction forces. Such movement can be vibrational in nature and is sufficient to overcome stiction, allowing a trapped element to be moveed to a desired location.

    摘要翻译： 提供了一些用于克服静摩擦的方法和系统。 这些系统包括能够在容易产生静电的区域上施加各种力的机电系统。 这些系统可以是MEMS阵列或其他类型的器件，其中发生静摩擦力。 这些方法包括在容易产生粘连力的地区引起运动的各种方法。 这种运动本质上可以是振动的，并且足以克服静摩擦，允许被困元件移动到期望的位置。

    Pickleball barrier
    10.
    发明授权
    Pickleball barrier 有权

    公开(公告)号：US11007416B2

    公开(公告)日：2021-05-18

    申请号：US16406636

    申请日：2019-05-08

    申请人： David Miller

    发明人： David Miller

    IPC分类号： A63B71/02 ,  E04H17/16 ,  A63B69/00

    摘要： A deployable pickleball barrier includes a plurality of panels having a first rigid surface, a second rigid surface, and a substantially straight channel coupling the rigid surfaces. Each of the plurality of panels are coupled with another of the plurality of panels by an interpanel joint that includes a rigid bond and a plurality of fold lines formed in the first rigid surface to form a rightwardly biasing hinge. Each of the plurality of panels includes an intrapanel joint including a plurality of fold lines formed in the second rigid surface to form a leftwardly biasing hinge. The deployable pickleball barrier can be folded at each of the hinges to alternate between a deployed configuration and a folded configuration.