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公开(公告)号:US20180358353A1
公开(公告)日:2018-12-13
申请号:US15736753
申请日:2017-05-15
发明人: Cuili GAI , Longyan WANG , Ling WANG , Quanhu LI , Yi-cheng LIN
IPC分类号: H01L27/02 , H01L27/12 , H01L29/786 , H01L29/66 , H01L49/02 , H01L21/768 , H01L29/788
CPC分类号: H01L27/0266 , H01L21/76877 , H01L21/77 , H01L27/02 , H01L27/0288 , H01L27/1255 , H01L28/40 , H01L29/66484 , H01L29/78648 , H01L29/788
摘要: An electrostatic discharge device comprises a transistor with one of its source and drain serving as an input terminal of said device and the other serving as an output terminal. Said transistor comprises: a first conductive layer used as a first floating gate; a first insulating layer covering said first conductive layer; an active layer on said first insulating layer; a second insulating layer covering said active layer; a second conductive layer used as a second floating gate and on said second insulating layer; a third insulating layer covering said second conductive layer; a third conductive layer and a fourth conductive layer on said third insulating layer and on both sides of the active layer, said third conductive layer being isolated from the fourth conductive layer, wherein said third conductive layer serves as one of the source and the drain and said fourth conductive layer serves as the other.